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首页> 外文期刊>Journal of Crystal Growth >Investigations on the effect ofcontacts on p-type CdTe DLTS-measurements
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Investigations on the effect ofcontacts on p-type CdTe DLTS-measurements

机译:接触对p型CdTe DLTS测量影响的研究

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摘要

DLTS-Measurements are an important tool in investigating the defect structure within a Schottky barrier. In polar compound semiconductors like CdTe it cannot be ruled out that the original defect structure of the semiconductor material is changed by the contact foramtion process. We report for the first time on influences of processes both of the surface pretreatment and of the deposition of contact metals on the results of deep level transient spectroscopy. We report as well on the influence of the ohmic contact on the measured level parameters. We are able to divide the determined defect levels in surface relevant and bulk relevant types.
机译:DLTS测量是研究肖特基势垒内缺陷结构的重要工具。在像CdTe这样的极性化合物半导体中,不能排除通过接触孔形成工艺改变了半导体材料的原始缺陷结构。我们首次报告了表面预处理和接触金属沉积过程对深能级瞬态光谱学结果的影响。我们还报告了欧姆接触对所测量的液位参数的影响。我们能够将确定的缺陷级别划分为表面相关类型和本体相关类型。

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