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首页> 外文期刊>Journal of Crystal Growth >Electrical properties of (001)-textured Pb(Zr,Ti)O-3 thin films with different BaPbO3 thicknesses
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Electrical properties of (001)-textured Pb(Zr,Ti)O-3 thin films with different BaPbO3 thicknesses

机译：BaPbO3厚度不同的（001）织构的Pb（Zr，Ti）O-3薄膜的电性能

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摘要

l The microstructure and electrical properties of highly (001)-textured lead zirconate titanate (PZT) thin films deposited on BaPbO3 (BPO) at 475 degrees C by RF-magnetron sputtering were studied. Twenty-three, 65, and 136 nm-thick BPOs were adopted in this study. The dielectric constant is approximately 433 for Pt/PZT/BPO (23 nm), 443 for Pt/PZT/BPO (65 nm), and 466 for Pt/PZT/BPO (136 nm). The remanant polarization values in these three capacitors are 13.5, 14.9, and 10.9 mu C/cm(2), and the coercive field values are 76.6, 71.2, and 54.5 kV/cm, respectively. The fatigue endurance of PZT films decreases with the thickness of BPO. The thickness of BPO layer not only influences the crystallinity of PZT films, but also the a-domain populations in PZT films. The variation of resultant electrical properties is attributed partly to the improvement of crystallinity, and partly to the population of a-domain. The effect of the former is remarkable when the BPO is thin while the latter is dominant when the BPO is thick. (c) 2006 Elsevier B.V. All rights reserved.
机译：l研究了在475℃下通过射频磁控溅射沉积在BaPbO3（BPO）上的高（001）结构的锆钛酸铅（PZT）薄膜的微观结构和电学性能。本研究采用了23、65和136 nm厚的BPO。 Pt / PZT / BPO（23 nm）的介电常数约为433，Pt / PZT / BPO（65 nm）的介电常数为443，Pt / PZT / BPO（136 nm）的介电常数为466。这三个电容器的剩余极化值分别为13.5、14.9和10.9μC / cm（2），矫顽场值分别为76.6、71.2和54.5 kV / cm。 PZT薄膜的疲劳强度会随着BPO厚度的增加而降低。 BPO层的厚度不仅影响PZT膜的结晶度，而且影响PZT膜中的a畴。所得电性能的变化部分归因于结晶度的改善，部分归因于α-畴的填充。当BPO较薄时，前者效果显着，而当BPO较厚时，后者则占主导地位。 （c）2006 Elsevier B.V.保留所有权利。

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