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首页> 外文期刊>Journal of Crystal Growth >Developments in abatement technology for MOCVD processing
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Developments in abatement technology for MOCVD processing

机译：用于MOCVD处理的减排技术的发展

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A newly developed technical solution has been developed for hydride gas abatement that utilizes a new material. The ULTIMA-Sorb~(TM) material provides high capacity but low heat of reaction with the hydride gases. The new technology results in a low cost of ownership (COO) with stable operation and also reduces the cost and quantity of waste disposal. This can be significant benefit for device manufacturers since it provides a viable and cost effective solution without any risk of arsenic leakage that is a primary concern with wet chemical scrubber systems. The contents of this paper will discuss the technical and economic benefits of the newly developed material in comparison to conventional abatement materials and systems. The capacity of the dry abatement materials significantly influences both COO relating to cash outflow and the cost of lost production. High capacity materials enable significant savings in cost of lost production in cases of low and high factory utilization conditions. Capacity of the abatement material appears to be the largest single factor to reduce COO of dry abatement systems.
机译：已经开发出一种新的技术解决方案，用于利用新材料来减少氢化物气体。 ULTIMA-Sorb TM材料提供高容量，但是与氢化物气体的反应热较低。这项新技术可以降低拥有成本（COO）并保持稳定运行，还可以减少废物处理的成本和数量。这对于设备制造商而言可能是一项重大好处，因为它提供了可行且具有成本效益的解决方案，而没有砷泄漏的任何风险，而砷泄漏是湿式化学洗涤器系统的主要考虑因素。本文的内容将讨论与常规减排材料和系统相比，新开发材料的技术和经济利益。干式减排材料的能力会极大地影响与现金流出有关的COO以及生产损失的成本。在工厂利用率低下的情况下，高容量材料可以大大节省生产损失的成本。减排材料的容量似乎是减少干式减排系统COO的最大单一因素。

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