Decomposition of methyl chloride by using an RF plasma reactor

Lien-Te Hsieh; Wen-Jhy Lee; Chuh-Yung Chen

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Decomposition of methyl chloride by using an RF plasma reactor

机译：通过使用RF等离子反应器分解氯甲烷

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Application of radio-frequency (RF) plasma as an alternative technology for the decomposition of methyl chloride (CH_3Cl) with oxygen is demonstrated. The results of this study revealed that, in the CH_3 Cl/O~2/Ar plasma, the decomposition fraction of Ch_3 Cl was over 99.99/100, which occurred at the condition designed for 3/100 of CH_3Cl feeding concentration, 1.0 of equivalence ratio (φ), 20 Torr of operation pressure, 100 sccm of total gas flow rate and 100 W of input power wattage.

机译：演示了将射频（RF）等离子体作为替代技术用氧气分解氯甲烷（CH_3Cl）的方法。研究结果表明，在CH_3 Cl / O〜2 / Ar等离子体中，CH_3 Cl的分解分数超过99.99 / 100，发生在为CH_3Cl进料浓度的3/100设计，当量为1.0的条件下比率（φ），20 Torr的工作压力，100 sccm的总气体流量和100 W的输入功率瓦数。

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来源
《Journal of Hazardous Materials》 |1998年第1期|p.69-90|共22页
作者
Lien-Te Hsieh; Wen-Jhy Lee; Chuh-Yung Chen;
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作者单位

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);美国《化学文摘》(CA);
原文格式 PDF
正文语种 eng
中图分类工程基础科学;
关键词
Radio-Frequency (RF); Plasma; Methyl chloride; Decomposition;

机译：射频（RF）;等离子体;氯甲烷;分解;

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Decomposition of methyl chloride by using an RF plasma reactor

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