Investigation on the Impact of Angle Dependency and Polarization on Radiation Heat Transfer

Mathieu Wijnen; Jos van Schijndel; Guenes Nakiboglu

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Investigation on the Impact of Angle Dependency and Polarization on Radiation Heat Transfer

机译：角度依赖性与极化对辐射热传递影响的研究

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In the semiconductor industry, there is an increasing demand for thermal stability to optimize the performance of lithography machines. This results in a need for computational tools that are able to accurately model radiation heat transfer, with the ability to include specular and angle-dependent reflection and take the influence of the polarization into account. An analytical approximation model of a square passage is formulated, that includes angle-dependent reflecting surfaces and the influence of polarization. These problems can be used as benchmarks to verify radiation modeling tools, e.g., COMSOL. The tool is validated by modeling an experiment and comparing the numerical results with the experimental data. The impact of angle dependency and polarization on the heat flux through passages is discussed.

机译：在半导体行业中，对热稳定性的需求越来越大，以优化光刻机的性能。这导致能够准确地模拟辐射热传递的计算工具，其能够包括镜面和角度依赖的反射并考虑偏振的影响。配制了方形通道的分析近似模型，其包括依赖角度反射表面和极化的影响。这些问题可以用作验证辐射建模工具的基准，例如COMSOL。通过对实验进行建模并将数值结果与实验数据进行比较来验证该工具。讨论了角度依赖性和极化对通过通道的热通量的影响。

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来源
《Journal of Heat Transfer》 |2021年第9期|092801.1-092801.12|共12页
作者
Mathieu Wijnen; Jos van Schijndel; Guenes Nakiboglu;
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作者单位

Energy Technology and Fluid Dynamics Department of Mechanical Engineering Eindhoven University of Technology Eindhoven 5600 MB The Netherlands;

Thermal Architecture Development & Engineering ASML Veldhoven 5504 DR the Netherlands;

Energy Technology and Fluid Dynamics Department of Mechanical Engineering Eindhoven University of Technology Eindhoven 5600 MB The Netherlands;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
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Investigation on the Impact of Angle Dependency and Polarization on Radiation Heat Transfer

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