Observation of Femtosecond Laser-Induced Ablation in Crystalline Silicon

Tae Y. Choi; Costas P. Grigoropoulos

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Observation of Femtosecond Laser-Induced Ablation in Crystalline Silicon

机译：飞秒激光诱导晶体硅烧蚀的观察

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The ablation of crystalline silicon by ultrashort laser pulses is studied experimentally. A pump-and-probe experiment is implemented in a collinear arrangement, utilizing a time-delayed frequency-doubled probe beam for in situ reflectance measurement and ultrafast microscopy observation. Enhanced surface reflectivity in sub-picosecond time scale at the center of the irradiated spot indicates nonthermal liquid layer formation. A short-lived nonthermal liquid phase was detected at fluence of 1.5 J/cm~2. In addition to this observation, the reflected images for pump beam fluences ranging from 1.5 to 4.6 J/cm~2 provide evidence of plasma expansion above the irradiated target.

机译：实验研究了超短激光脉冲对晶体硅的烧蚀。以共线方式实施泵浦和探针实验，利用时延倍频探针束进行原位反射率测量和超快速显微镜观察。在亚皮秒级的时间范围内，在受辐照点的中心处增强的表面反射率指示非热液层的形成。在1.5 J / cm〜2的注量下检测到短寿命的非热液相。除此观察外，泵浦光束通量在1.5至4.6 J / cm〜2范围内的反射图像还提供了等离子体在被照射目标上方膨胀的证据。

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来源
《Journal of Heat Transfer》 |2004年第5期|p.723-726|共4页
作者
Tae Y. Choi; Costas P. Grigoropoulos;
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作者单位

Institute of Energy Technology, Swiss Federal Institute of Technology Zurich, Zurich, CH-8092 Switzerland;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类热力工程、热机;
关键词
crystalline silicon; pump-and-probe; ultrafast microscopy; plasma;

机译：晶体硅;泵浦和探针;超快速显微镜;等离子体;

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1. Ultrafast pump-probe microscopic imaging of femtosecond laser-induced melting and ablation in single-crystalline silicon carbide [J] . D. Satoh, T. Shibuya, E. Terasawa, Applied Physics . 2020,第10期

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2. Dynamics and its modulation of laser-induced plasma and Shockwave in femtosecond double-pulse ablation of silicon [J] . Pan Changji, Wang Qingsong, Sun Jingya, Annales de l'I.H.P . 2020,第1期

机译：动态及其调制激光诱导等离子体和冲击波在硅的飞秒双脉冲烧蚀中
3. Femtosecond laser-induced size reduction and emission quantum yield enhancement of colloidal silicon nanocrystals: effect of laser ablation time [J] . Zhang Y. X., Wu W. S., Hao H. L., Nanotechnology . 2018,第36期

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4. Ultraviolet femtosecond and nanosecond laser ablation of silicon: ablation efficiency and laser-induced plasma expansion [C] . Xianzhong Zeng, Xianglei Mao, Ralph Greif, High-Power Laser Ablation V pt.2 . 2004

机译：紫外线飞秒和纳秒激光烧蚀硅：烧蚀效率和激光诱导的等离子体膨胀
5. Characterization of ablation and atomic emission enhancements in dual-pulse laser-induced breakdown spectroscopy using femtosecond- and nanosecond-pulse lasers. [D] . Scaffidi, Jonathan Peter. 2005

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6. Femtosecond Laser-Induced Nanoparticle-Embedded PeriodicSurface Structures on Crystalline Silicon for Reproducible and Multi-utilitySERS Platforms [O] . Syed Hamad, Sree Satya Bharati Moram, Balaji Yendeti, 2018

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7. Ultraviolet femtosecond and nanosecond laser ablation of silicon: Ablation efficiency and laser-induced plasma expansion [O] . Zeng, Xianzhong, Mao, Xianglei, Greif, Ralph, 2004

机译：紫外飞秒和纳秒激光烧蚀硅：烧蚀效率和激光诱导的等离子体膨胀
8. Ultraviolet Femtosecond and Nanosecond Laser Ablation of Silicon: Ablation Efficiency and Laser-Induced Plasma Expansion [R] . Zong, X., Mao, X., Greif, R., 2005

机译：紫外飞秒和纳秒激光烧蚀硅：烧蚀效率和激光诱导等离子体膨胀

Observation of Femtosecond Laser-Induced Ablation in Crystalline Silicon

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