Transient Thermal Bubble Formation on Polysilicon Micro-Resisters

Jr-Hung Tsai; Liwei Lin

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Transient Thermal Bubble Formation on Polysilicon Micro-Resisters

机译：多晶硅微容器上的瞬态热气泡形成

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Transient bubble formation experiments are investigated on polysilicon micro-resisters having dimensions of 95 μm in length, 10 μm or 5 μm in width, and 0.5 μm in thickness. Micro resisters act as both resistive heating sources and temperature transducers simul- Taneously to measure the transient temperature responses beneath the thermal bubbles. The micro bubble nucleation processes can be classified into three groups depending on The levels of the input current. When the input current level is low, no bubble is nucleated.

机译：在尺寸为长95μm，宽10μm或5μm，厚0.5μm的多晶硅微电阻上研究了瞬态气泡形成实验。微型电阻器同时充当电阻加热源和温度传感器，以测量热气泡下方的瞬态温度响应。根据输入电流的大小，微气泡成核过程可分为三类。当输入电流电平低时，没有气泡成核。

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来源
《Journal of Heat Transfer》 |2002年第2期|p.375-382|共8页
作者
Jr-Hung Tsai; Liwei Lin;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类热力工程、热机;
关键词
Bubble Growth; Heat Transfer; Microscale; Phase Change;

机译：气泡增长;传播热量;微量;相变;

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1. Formation of high-quality oxideitride stacked layers on rugged polysilicon electrodes by rapid thermal oxidation [J] . Itoh S., Lo G.Q. IEEE Transactions on Electron Devices . 1993,第6期

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2. Analysis of Transient Thermal Stress and Thermal Deformation of an Angle-Ply Laminated Rectangular Plate Due to Nonuniform Heat Supply Based on Higher-Order Shear Deformation Theory [J] . Yoshinobu TANIGAWA, Kazuki NAGAYAMA, Ryuusuke KAWAMURA JSME International Journal. Series A, Solid mechanics and material engineering . 1996,第4期

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3. Analysis of Transient Thermal Stress and Thermal Deformation of an Angle-Ply Laminated Rectangular Plate Due to Nonuniform Heat Supply Based on Higher-Order Shear Deformation Theory [J] . Yoshinobu TANIGAWA, Kazuki NAGAYAMA, Ryuusuke KAWAMURA JSME International Journal. Series A, Solid mechanics and material engineering . 1996,第4期

机译：基于高阶剪切变形理论的角板层合矩形板非均匀供热的瞬态热应力和热变形分析
4. Transient bubble formation on a polysilicon micro resister [C] . Jr-hung Tsai, Liwei Lin ASME international mechanical engineering congress and exposition;IMECE-2000 . 2000

机译：多晶硅微电阻上的瞬态气泡形成
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Transient Thermal Bubble Formation on Polysilicon Micro-Resisters

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