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Principle and structure of a printed circuit board process-based piezoelectric microfluidic pump integrated into printed circuit board

机译:集成到印刷电路板中的基于印刷电路板过程的压电微流体泵的原理和结构

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摘要

Considering mature printed circuit board processes, researches on microfluidic pumps that can be integrated into printed circuit board will provide a solution for further miniaturization and integration of microfluidic systems with low costs. The principle and structure of a printed circuit board process-based piezoelectric microfluidic pump integrated into printed circuit board are proposed and realized in this article. The printed circuit board process-based design and manufacturing technology of a piezoelectric microfluidic pump integrated into printed circuit board is researched utilizing printed circuit board as a platform. The flow characteristics of the fabricated microfluidic pump are experimentally tested. The research results show that the proposed principle and structure of the piezoelectric microfluidic pump can be fabricated utilizing mature printed circuit board process with advantages of simple structure and convenient processing. The fabricated printed circuit board process-based microfluidic pump can linearly pump in and pump out fluid with self-injection. Moreover, the flow rate and back pressure can be controlled by changing the peak-to-peak value, frequency, and phase difference of the driving voltages. The instantaneous flow rate has the pulsation property consistent with the drive voltage frequency. The proposed principle and structure are beneficial to integrate the fabricated printed circuit board process-based microfluidic pump with other microfluidic components to realize complicated microfluidic systems on printed circuit board.
机译:考虑到成熟的印刷电路板工艺,对可集成到印刷电路板中的微流体泵的研究将为低成本进一步实现微流体系统的小型化和集成化提供解决方案。本文提出并实现了一种集成在印刷电路板上的基于印刷电路板工艺的压电微流体泵的原理和结构。以印刷电路板为平台,研究了基于印刷电路板工艺的压电微流体泵集成于印刷电路板的设计与制造技术。所制造的微流体泵的流动特性已通过实验测试。研究结果表明,所提出的压电微流体泵的原理和结构可以利用成熟的印刷电路板工艺来制造,具有结构简单,加工方便的优点。所制造的基于印刷电路板工艺的微流泵可以通过自注入线性地泵入和泵出流体。此外,可以通过改变驱动电压的峰-峰值,频率和相位差来控制流量和背压。瞬时流量具有与驱动电压频率一致的脉动特性。所提出的原理和结构有利于将制造的基于印刷电路板工艺的微流体泵与其他微流体组件集成在一起,以在印刷电路板上实现复杂的微流体系统。

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