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Characterization of Failed Surface of Ti and Imidex (PI) Film for Different Inter-layer Thicknesses of Ti Film

机译:不同Ti层间厚度的Ti和Imidex(PI)膜失效表面的表征

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For miniaturized biomedical devices, laser joining of dissimilar materials offers excellent potential to make precise joints. An important system for consideration is titanium (Ti) coated glass joined with biocompatible imidex polyimide (PI). Metallic Ti with various thicknesses was deposited on top of pyrex 7740 borosilicate glass by using DC-magnetron sputtering deposition method. Effect of bond strength between Ti coated glass and imidex polyimide (PI), due to thickness variation of sputtered Ti coating was studied. Three different Ti inter-layer thicknesses were considered, 50, 200, and 400 nm. Tests results indicated that the thinner film produced lower shear strength and higher thickness produced higher shear strength. It has been observed that thicker film (200 and 400 nm) enhanced considerably the bond strength with enhancing the film roughness as well. Higher roughness resulted in more contact area at the interface, results higher number of chemical bonds and increased mechanical interlocking; which in turn increase the laser joint strength. For stronger bond with higher thickness, mixed mode failure was observed which included cohesive failure of polymer, interface failure of Ti/glass and failure on the glass itself. On the other hand, for weak bond with thinner film, mostly interface failure was observed for this system of Ti coated glass/imidex. For thicker film, chemical bond of Ti-C and Ti-O were observed. The role of both surface characteristics and chemical bonding for laser joints were investigated by using advanced techniques such as X-ray photoelectron spectroscopy, scanning electron microscopy, and energy dispersive spectroscopy.
机译:对于小型化的生物医学设备,异种材料的激光连接具有制造精确关节的巨大潜力。需要考虑的重要系统是钛(Ti)涂层玻璃与生物相容性imidex聚酰亚胺(PI)结合在一起。使用直流磁控溅射沉积法将各种厚度的金属钛沉积在派热克斯7740硼硅酸盐玻璃的顶部。研究了由于溅射的Ti涂层的厚度变化而导致的Ti涂层玻璃与imidex聚酰亚胺(PI)之间的结合强度的影响。考虑了三种不同的Ti层间厚度,分别为50、200和400 nm。试验结果表明,较薄的薄膜产生较低的剪切强度,较高的厚度产生较高的剪切强度。已经观察到,较厚的膜(200和400nm)显着提高了结合强度,同时也提高了膜的粗糙度。较高的粗糙度导致在界面处更多的接触面积,导致更多的化学键和增加的机械互锁;从而增加了激光接头的强度。对于具有更高厚度的更牢固的结合,观察到混合模式破坏,包括聚合物的内聚破坏,Ti /玻璃的界面破坏以及玻璃本身的破坏。另一方面,对于与较薄薄膜的弱结合,对于这种涂有Ti的玻璃/酰亚胺的体系,大多数观察到界面破坏。对于较厚的膜,观察到Ti-C和Ti-O的化学键。通过使用先进的技术(例如X射线光电子能谱,扫描电子显微镜和能量色散光谱)研究了表面特征和化学键合在激光接头中的作用。

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