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A Study on Microstructure and Dielectric Performances of Alumina/Copper Composites by Plasma Spray Coating

机译:等离子喷涂的氧化铝/铜复合材料的微观结构和介电性能的研究

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In this study, surfaces of copper plates were coated with a thick alumina layer by the plasma spray coating to fabricate a composite with a dielectric performance that made them suitable as substrates in electronic devices with high thermal dissipation. The performance of alumina dielectric layer fabricated by the plasma spray coating and traditional screen-printing process was compared, respectively. Effects of the spraying parameters and size of alumina particles on the microstructure, thickness, and the surface roughness of the coated layer were explored. In addition, the thermal resistance perpendicular to the interface of copper and alumina and the breakdown voltage across the alumina layer of the composite were also investigated. Experimental results indicated that alumina particles with 5-22 μm in diameter tended to form a thicker layer with a poorer surface roughness than that of the particles with 22-45 μm in diameter. The thermal resistance increased with the surface roughness of the alumina layer, and the breakdown voltage was affected by the ambient moisture, the microstructure and the thickness of the layer. The optimal parameters for plasma spray coating were an alumina powder of particles size between 22 and 45 μm, a plasma power of 40 kW, a spraying velocity of 750 m/s, an argon flow rate of 45 L/min, a spraying distance of 140 mm, and a spraying angle of 90°. It can be concluded that an alumina layer thickness of 20 μm provided a low surface roughness, low thermal resistance, and highly reliable breakdown voltage (38 V/μm).
机译:在这项研究中,铜板的表面通过等离子喷涂涂覆了一层厚厚的氧化铝层,以制造具有介电性能的复合材料,使其适合用作具有高散热性的电子设备的基板。分别比较了等离子喷涂和传统丝网印刷工艺制备的氧化铝介电层的性能。探索了喷涂参数和氧化铝颗粒尺寸对涂层的微观结构,厚度和表面粗糙度的影响。此外,还研究了垂直于铜和氧化铝界面的热阻以及复合材料氧化铝层两端的击穿电压。实验结果表明,与直径为22-45μm的氧化铝颗粒相比,直径为5-22μm的氧化铝颗粒倾向于形成较厚的表面粗糙度较差的层。耐热性随氧化铝层的表面粗糙度而增加,并且击穿电压受环境湿度,层的微观结构和厚度的影响。等离子喷涂的最佳参数是粒径为22至45μm的氧化铝粉末,等离子功率为40 kW,喷涂速度为750 m / s,氩气流速为45 L / min,喷涂距离为140毫米,喷雾角度为90°。可以得出结论,厚度为20μm的氧化铝层具有较低的表面粗糙度,较低的耐热性和高度可靠的击穿电压(38 V /μm)。

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