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首页> 外文期刊>Journal of Materials Engineering and Performance >Fabrication of 3-D Submicron Glass Structures by FIB
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Fabrication of 3-D Submicron Glass Structures by FIB

机译：FIB制作3-D亚微米玻璃结构

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摘要

The fabrication characteristic of focused ion beam (FIB) for Pyrex glass was investigated. FIB has several advantages such as high resolution, high material removal rates, low forward scattering, and direct fabrication in selective area without any etching mask. In this study, FIB-etched Pyrex glass was used for fast fabrication of 3-D submicron structures. A glass structure with 0.39 μm in width was fabricated. The experimental results in terms of limiting beam size, ion dose (ion/cm2), and beam current are discussed. The influence of XeF2 gas on FIB glass fabrication was investigated.
机译：研究了耐热玻璃聚焦离子束（FIB）的制备特性。 FIB具有多个优势，例如高分辨率，高材料去除率，低正向散射以及无需任何蚀刻掩模即可在选择区域中直接制造。在这项研究中，FIB蚀刻的派热克斯玻璃被用于快速制造3-D亚微米结构。制备了宽度为0.39μm的玻璃结构。讨论了在限制束大小，离子剂量（ion / cm2 ）和束电流方面的实验结果。研究了XeF2 气体对FIB玻璃制备的影响。

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    C.H. Chao; S.C. Shen; J.R. Wu;

  • 作者单位

    Department of Mechanical and Electro-Mechanical Engineering and Center for Nanoscience ampamp Nanotechnology National Sun Yat-Sen University Kaoshiung 804 Taiwan;

    Department of Systems and Naval Mechatronic Engineering National Cheng Kung University Tainan 701 Taiwan;

    Department of Mechanical and Electro-Mechanical Engineering and Center for Nanoscience ampamp Nanotechnology National Sun Yat-Sen University Kaoshiung 804 Taiwan;

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  • 正文语种 eng
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  • 关键词

    focused-ion beam; pyrex glass; submicron; XeF2;

    机译：聚焦离子束;耐热玻璃;亚微米;XeF2;

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