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首页> 外文期刊>Journal of Materials Research >Ion beam energy dependence of surface and structural properties of amorphous carbon films deposited by IBSD method on Ni-Cu alloy
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Ion beam energy dependence of surface and structural properties of amorphous carbon films deposited by IBSD method on Ni-Cu alloy

机译：IBSD方法在Ni-Cu合金上沉积非晶碳膜的表面和结构特性对离子束能量的依赖性

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摘要

The amorphous carbon thin films were deposited by the ion beam sputtering deposition technique on Ni-Cu alloy substrates. The effect of sputtering ion beam energy on wettability, surface, and structural properties of thin films was examined. The sputtering ion beam energy was varied over a wide range from 2 to 5 keV. Raman spectra showed that the values of I_D/I_G ratio and the 'G' peak position have a reduction trend by increasing the argon ion beam energy while the surface roughness increased due to the resputtering effect. The wettability and surface energy of a-C carbon films were studied by contact angle measurements in relation to structure and topography. The deposited films showed a relatively high water contact angle (CA) that decreases from 87° to 75°. The X-ray photoelectron spectroscopy showed that the value of sp~3/sp~2 bond content of a-C thin films deposited with the highest argon ion beam energy of 5 keV was about 0.8. Furthermore, the optical band gap followed similar trends of the structural properties.
机译：通过离子束溅射沉积技术将非晶碳薄膜沉积在Ni-Cu合金基板上。检查了溅射离子束能量对薄膜的润湿性，表面和结构特性的影响。溅射离子束能量在2至5 keV的宽范围内变化。拉曼光谱显示，通过增加氩离子束能量，I_D / I_G比值和“ G”峰位置的值具有减小的趋势，而由于再溅射效应，表面粗糙度增加。通过与结构和形貌有关的接触角测量研究了a-C碳膜的润湿性和表面能。沉积的薄膜显示出相对较高的水接触角（CA），从87°降低到75°。 X射线光电子能谱表明，以最高氩离子束能量为5 keV沉积的a-C薄膜的sp〜3 / sp〜2键含量为0.8左右。此外，光学带隙遵循类似的结构特性趋势。

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  • 来源
    《Journal of Materials Research》 |2017年第7期|1258-1266|共9页
  • 作者

    Elham Mohagheghpour; Maijan Rajabi; Reza Gholamipour; Majid M. Larijani; Shahab Sheibani;

  • 作者单位

    Department of Advanced Materials and Renewable Energy, Iranian Research Organization for Science and Technology, Tehran 33535111, Iran;

    Department of Advanced Materials and Renewable Energy, Iranian Research Organization for Science and Technology, Tehran 33535111, Iran;

    Department of Advanced Materials and Renewable Energy, Iranian Research Organization for Science and Technology, Tehran 33535111, Iran;

    Radiation Application Research School, Nuclear Sciences and Technology Institute, Tehran 14395836, Iran;

    Radiation Application Research School, Nuclear Sciences and Technology Institute, Tehran 14395836, Iran;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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