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Direct synthesis of ultra-thin large area transition metal dichalcogenides and their heterostructures on stretchable polymer surfaces

机译:可拉伸聚合物表面上超薄大面积过渡金属二卤化物及其异质结构的直接合成

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摘要

A scalable approach for synthesis of ultra-thin (<10 nm) transition metal dichalcogenides (TMD) films on stretchable polymeric materials is presented. Specifically, magnetron sputtering from pure TMD targets, such as MoS_2 and WS_2, was used for growth of amorphous precursor films at room temperature on polydimethylsiloxane substrates. Stacks of different TMD films were grown upon each other and integrated with optically transparent insulating layers such as boron nitride. These precursor films were subsequently laser annealed to form high quality, few-layer crystalline TMDs. This combination of sputtering and laser annealing is commercially scalable and lends itself well to patterning. Analysis by Raman spectroscopy, scanning probe, optical, and transmission electron microscopy, and x-ray photoelectron spectroscopy confirm our assertions and illustrate annealing mechanisms. Electrical properties of simple devices built on flexible substrates are correlated to annealing processes. This new approach is a significant step toward commercial-scale stretchable 2D heterostructured nanoelectronic devices.
机译:提出了一种可伸缩的方法,用于在可拉伸的聚合物材料上合成超薄(<10 nm)过渡金属二卤化金属(TMD)薄膜。具体地,使用来自纯TMD靶材(例如MoS_2和WS_2)的磁控溅射在室温下在聚二甲基硅氧烷衬底上生长非晶态前体膜。将不同的TMD膜堆叠在一起,并与诸如氮化硼的光学透明绝缘层集成在一起。随后将这些前体膜进行激光退火,以形成高质量的几层晶体TMD。溅射和激光退火的这种组合在商业上是可扩展的,并且非常适合于图案化。通过拉曼光谱,扫描探针,光学和透射电子显微镜以及X射线光电子能谱进行的分析证实了我们的主张并阐明了退火机理。建立在柔性基板上的简单设备的电性能与退火过程相关。这种新方法是迈向商业规模可拉伸2D异质结构纳米电子器件的重要一步。

著录项

  • 来源
    《Journal of Materials Research》 |2016年第7期|967-974|共8页
  • 作者单位

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA,Department of Materials Science and Engineering, University of North Texas, Denton, Texas 76203, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA University of Dayton Research Institute, Dayton, Ohio 45469, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA University of Dayton Research Institute, Dayton, Ohio 45469, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA University of Dayton Research Institute, Dayton, Ohio 45469, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA University of Dayton Research Institute, Dayton, Ohio 45469, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA University of Dayton Research Institute, Dayton, Ohio 45469, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA University of Dayton Research Institute, Dayton, Ohio 45469, USA;

    Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA Department of Mechanical Engineering, University of Dayton, Dayton, Ohio 45469, USA;

    Mechanical and Nuclear Engineering, Pennsylvania State University, University Park, Pennsylvania 16801, USA;

    Department of Chemical and Materials Engineering, University of Dayton, Dayton, Ohio 45469, USA Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA;

    Department of Chemical and Materials Engineering, University of Dayton, Dayton, Ohio 45469, USA Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA;

    Department of Chemical and Materials Engineering, University of Dayton, Dayton, Ohio 45469, USA Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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