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首页> 外文期刊>Journal of Materials Research >Friction, nanostructure, and residual stress of single-layer and multi-layer amorphous carbon films deposited by radio-frequency sputtering
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Friction, nanostructure, and residual stress of single-layer and multi-layer amorphous carbon films deposited by radio-frequency sputtering

机译：射频溅射沉积的单层和多层非晶碳膜的摩擦，纳米结构和残余应力

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摘要

Single- and multi-layer amorphous carbon (a-C) films of varying thickness were deposited on Si(100) substrates by radio-frequency sputtering in a pure Ar atmosphere. The thickness, roughness, coefficient of friction, and residual stress of the a-C films were measured by profilometry, atomic force microscopy, surface force microscopy, and curvature method, respectively. The through-thickness nanostructure and elemental composition of the films were examined by cross-sectional transmission electron microscopy and electron energy loss spectroscopy. The multi-layer a-C films, consisting of alternating ～10-nm-thick hard and soft a-C layers deposited under 0 and -200 V substrate bias, respectively, were found to exhibit lower roughness, coefficient of friction, and residual stress and slightly higher tetrahedral carbon atom hybridization than single-layer a-C films of similar thickness. The results of this study reveal a strong correlation of the friction characteristics with the surface roughness and nanostructure of single- and multi-layer a-C films.
机译：通过在纯Ar气氛中进行射频溅射，将厚度不同的单层和多层非晶碳（a-C）膜沉积在Si（100）衬底上。通过轮廓测定法，原子力显微镜法，表面力显微镜法和曲率法分别测量了a-C膜的厚度，粗糙度，摩擦系数和残余应力。通过横截面透射电子显微镜和电子能量损失谱检查了薄膜的全厚度纳米结构和元素组成。发现多层aC膜分别由在〜0和-200 V衬底偏压下沉积的〜10 nm厚的交替的aC硬和软aC层组成，具有较低的粗糙度，摩擦系数和残余应力，而稍高一些四面体碳原子杂交的厚度要比单层aC薄膜的相似。这项研究的结果表明，摩擦特性与单层和多层a-C膜的表面粗糙度和纳米结构有很强的相关性。

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  • 来源
    《Journal of Materials Research》 |2016年第13期|1857-1864|共8页
  • 作者

    Jun Xie; Kyriakos Komvopoulos;

  • 作者单位

    Department of Mechanical Engineering, University of California, Berkeley, California 94720, USA;

    Department of Mechanical Engineering, University of California, Berkeley, California 94720, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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