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A study on thick coatings of tetrahedral amorphous carbon deposited by filtered cathode vacuum arc plasma

机译：过滤阴极真空电弧等离子体沉积四面体非晶碳厚涂层的研究

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摘要

Thick coatings of tetrahedral amorphous carbon (ta-C) have great existing and potential commercial importance for components such as automobile accessories. We confirmed the feasibility of depositing thick ta-C coating on Si wafer, WC, stainless steel (STS), and Al alloy substrates by a home-made filtered cathode vacuum arc. A ta-C coating of 800 nm thickness was successfully deposited over 20 min continuous coating. Interestingly, coatings with thicknesses exceeding 1 μm were easily delaminated by thermal and internal stress effects when the coating time exceeded 20 min. Varying the bias (0 V (⇔) 500 V) was highly effective in controlling the internal stress relaxation of the ta-C. This method showed significant improvements in the stress relaxation of the ta-C coatings. By applying multicycle coating, the thickness and hardness of the ta-C coating could reach 9.3 μm and 45 GPa, respectively, at a coating speed of 3.0 μm/h on a fixed substrate.
机译：四面体无定形碳（ta-C）的厚涂层对于诸如汽车配件之类的组件具有巨大的现有和潜在的商业重要性。我们证实了通过自制的过滤阴极真空电弧在Si晶片，WC，不锈钢（STS）和铝合金基底上沉积厚ta-C涂层的可行性。在20分钟的连续涂层中成功沉积了800 nm厚度的ta-C涂层。有趣的是，当涂层时间超过20分钟时，厚度超过1μm的涂层很容易受到热和内部应力的影响而分层。改变偏压（0 V（⇔）500 V）在控制ta-C的内部应力松弛方面非常有效。该方法在ta-C涂层的应力松弛方面显示出显着改善。通过施加多周期涂层，在固定基板上以3.0μm/ h的涂覆速度，ta-C涂层的厚度和硬度可以分别达到9.3μm和45 GPa。

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  • 来源
    《Journal of Materials Research》 |2016年第13期|1957-1963|共7页
  • 作者

    Young-Jun Jang; Gi Taek Kim; Yong-Jin Kang; Dong-Sik Kim; Jong-Kuk Kim;

  • 作者单位

    Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea;

    Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea;

    Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea;

    Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea;

    Surface Engineering Department, Implementation Research Division, Korea Institute of Materials Science (KIMS), Gyeongnam 51508, Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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