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Platform for in-plane ZT measurement and Hall coefficient determination of thin films in a temperature range from 120 K up to 450 K

机译:用于在120 K至450 K的温度范围内进行薄膜的平面内ZT测量和霍尔系数确定的平台

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摘要

The characterization of nanostructured samples with at least one restricted dimension like thin films or nanowires is challenging but important to understand their structure and transport mechanism and to improve current industrial products and production processes. We report on the development of a chip-based platform to simultaneously measure the in-plane electrical and thermal conductivity, the Seebeck coefficient as well as the Hall constant of a thin film in the temperature range from 120 K up to 450 K and in a magnetic field of up to 1 T. Due to the design of the setup, time consuming preparation steps can be omitted and a nearly simultaneous measurement of the sample properties is achieved. Typical errors caused by different sample compositions, varying sample geometries, and different heat profiles are avoided with the presented measurement method. As a showcase study displaying the validity and accuracy of our system, we present measurements of the thermoelectric properties of a 110 nm Bi_(87)Sb_(13) thin film in the temperature range from 120 K up to 450 K.
机译:具有至少一个有限尺寸的纳米结构样品(如薄膜或纳米线)的表征具有挑战性,但对于理解其结构和运输机理以及改善当前的工业产品和生产工艺而言,具有重要意义。我们报告了基于芯片的平台的开发情况,该平台可以同时测量120 K至450 K的温度范围内和温度范围内的薄膜的面内电导率和热导率,塞贝克系数以及霍尔常数。磁场高达1T。由于设置的设计,可以省去耗时的准备步骤,并且几乎可以同时测量样品的性能。使用本发明的测量方法可以避免由不同的样品成分,不同的样品几何形状以及不同的热曲线引起的典型误差。作为展示我们系统有效性和准确性的展示性研究,我们介绍了在120 K至450 K的温度范围内测量110 nm Bi_(87)Sb_(13)薄膜的热电性能的方法。

著录项

  • 来源
    《Journal of Materials Research》 |2016年第20期|3196-3204|共9页
  • 作者单位

    Institute of Nanostructure and Solid State Physics, Universitaet Hamburg, Hamburg 20355, Germany;

    Institute for Microtechnologies, RheinMain University of Applied Sciences Wiesbaden, Ruesselsheim 65428, Germany;

    Institute of Nanostructure and Solid State Physics, Universitaet Hamburg, Hamburg 20355, Germany Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Dresden 01171, Germany;

    Department of Microsystems Engineering-IMTEK, University of Freiburg, Freiburg 79110, Germany;

    Institute of Nanostructure and Solid State Physics, Universitaet Hamburg, Hamburg 20355, Germany Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Dresden 01171, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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