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Fluorine-doped tin oxide films with a high figure of merit fabricated by spray pyrolysis

机译：喷涂热解法制备的氟掺杂氧化锡薄膜，具有较高的品质因数

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摘要

Fluorine-doped tin oxide (FTO) thin films were deposited by spray pyrolysis in a pulse mode at 450 ℃ on glass substrates, using an alcoholic solution of SnCl_4-5H_2O and NH_4F with different F/Sn ratios in the precursor solution. The film structure was nanocrystalline for all molar F/Sn ratios in the solution from 0 to 1.0. Postdeposition annealing treatments were not carried out. The films with a F/Sn = 0.35-1.0 ratio present a high grain orientation in the (200) crystallographic plane. A minimum sheet resistance of 4.5 Ω/sq, a resistivity of 2.2 × 10~(-4) Ω cm, a maximum electron mobility of 21.6 cm~2/V s, and a carrier concentration of 1.7 × 10~(21) cm~(-3), corresponding to a strong degeneration of the electron gas in the conduction band, as well as a mean value of the transmittance of 0.84 in the visible spectral range, were obtained for the films fabricated with a F/Sn = 0.5 ratio. A high value of the figure of merit was obtained using two methods (38.8 × 10~(-3) Ω~(-1) and 5.75 Ω~(-1)), that is, comparable with the highest values reported to date.
机译：在前驱体溶液中，使用具有不同F / Sn比的SnCl_4-5H_2O和NH_4F醇溶液，在450℃下以脉冲模式通过喷雾热解法沉积掺杂氟的氧化锡（FTO）薄膜。对于溶液中从0至1.0的所有摩尔F / Sn比，膜结构是纳米晶体。沉积后不进行退火处理。 F / Sn = 0.35-1.0的薄膜在（200）晶面中表现出较高的晶粒取向。最小薄层电阻为4.5Ω/ sq，电阻率为2.2×10〜（-4）Ωcm，最大电子迁移率为21.6 cm〜2 / V s，载流子浓度为1.7×10〜（21）cm对于用F / Sn = 0.5制成的薄膜，获得了〜（-3），这对应于导带中电子气的强烈变性以及可见光谱范围内0.84的透射率平均值比。使用两种方法（38.8×10〜（-3）Ω〜（-1）和5.75Ω〜（-1））获得了较高的品质因数值，这与迄今为止报道的最高值相当。

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  • 来源
    《Journal of Materials Research》 |2015年第13期|2040-2045|共6页
  • 作者

    Oleksandr Malik; Francisco Javier De la Hidalga-Wade; Raquel Ramirez Amador;

  • 作者单位

    Electronics Department, Instituto Nacional de Astrofisica, Optica y Electronica (INAOE), Puebla 72000, Mexico;

    Electronics Department, Instituto Nacional de Astrofisica, Optica y Electronica (INAOE), Puebla 72000, Mexico;

    Mechatronics Department, Universidad Tecnologica de Huejotzingo, Puebla 74169, Mexico;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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