Measuring the volume charge in dielectric films using single frequency electro-acoustic waves

著录项

• 来源
  《Journal of Materials Research》 |2014年第4期|501-508|共8页
• 作者

  Dongfei Pei; Yuri M. Shkel; Daniel J. Klingenberg; Zakai I. Segal; Yoshio Nishi; J. Leon Shohet;

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• 作者单位

  Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706;

  Commet LLC, Fitchburg, Wisconsin 53711;

  Department of Chemical and Biological Engineering and Rheology Research Center, University of Wisconsin, Madison, Wisconsin 53706;

  Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706;

  Department of Electrical Engineering Stanford University, Stanford, California 94305;

  Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706;

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• 正文语种 eng
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