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Surface irradiation and materials processing using polyatomic cluster ion beams

机译：使用多原子簇离子束的表面辐照和材料处理

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摘要

We developed a polyatomic cluster ion beam system for materials processing, and polyatomic clusters of materials such as alcohol and water were produced by an adiabatic expansion phenomenon. In this article, cluster formation is discussed using thermodynamics and fluid dynamics. To investigate the interactions of polyatomic cluster ions with solid surfaces, various kinds of substrates such as Si(100), SiO_2, mica, polymethyl methacrylate, and metals were irradiated by ethanol, methanol, and water cluster ion beams. To be specific, chemical reactions between radicals of polyatomic molecules and surface Si atoms were investigated, and low-irradiation damage as well as high-rate sputtering was carried out on the Si(100) surfaces. Furthermore, materials processing methods including high-rate sputtering, surface modification, and micropatterning were demonstrated with ethanol and water cluster ion beams.
机译：我们开发了用于材料加工的多原子簇离子束系统，并且由于绝热膨胀现象而产生了诸如酒精和水等材料的多原子簇。在本文中，将使用热力学和流体动力学讨论团簇的形成。为了研究多原子团簇离子与固体表面的相互作用，用乙醇，甲醇和水团簇离子束辐照了各种基材，例如Si（100），SiO_2，云母，聚甲基丙烯酸甲酯和金属。具体而言，研究了多原子分子的自由基与表面Si原子之间的化学反应，并对Si（100）表面进行了低辐照损伤和高速率溅射。此外，用乙醇和水簇离子束证明了材料加工方法，包括高速溅射，表面改性和微图案化。

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  • 来源
    《Journal of Materials Research》 |2012年第5期|p.806-821|共16页
  • 作者

    Gikan H. Takaoka; Hiromichi Ryuto; Mitsuaki Takeuchi;

  • 作者单位

    Photonics and Electronics Science and Engineering Center, Kyoto University, Katsura, Kyoto 615-8510, Japan;

    Photonics and Electronics Science and Engineering Center, Kyoto University, Katsura, Kyoto 615-8510, Japan;

    Photonics and Electronics Science and Engineering Center, Kyoto University, Katsura, Kyoto 615-8510, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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