...
首页> 外文期刊>Journal of Materials Research >Effects of misfit dislocation and film-thickness on the residual stresses in epitaxial thin film systems: Experimental analysis and modeling
【24h】

Effects of misfit dislocation and film-thickness on the residual stresses in epitaxial thin film systems: Experimental analysis and modeling

机译:错配位错和膜厚对外延薄膜系统中残余应力的影响:实验分析和建模

获取原文
获取原文并翻译 | 示例
           

摘要

In a thin film system involving dissimilar materials, the residual stresses and microstructural defects are inevitable due to the misfits of lattice structures and thermal properties of the materials. Unfortunately, the relationship between the stresses and interface defects is still unclear to date. This article aims to clarify such an important relationship by a finite element (FE) analysis incorporating the dislocation distribution from high-resolution transmission electron microscopy. Layer removal and Raman spectroscopy were also conducted to explore the film-thickness effect. It was found that that residual stress variation in a thin film system is caused by the coupled effect of lattice-thermal misfits and discrete interfacial dislocations, that the residual stresses are dependent on the film thickness, and that it is particularly important to identify the correct density of interface dislocations for an accurate residual stress calculation by a FE analysis.
机译:在涉及不同材料的薄膜系统中,由于晶格结构的不匹配和材料的热性能,不可避免地会产生残余应力和微观结构缺陷。不幸的是,应力和界面缺陷之间的关系至今仍不清楚。本文旨在通过结合高分辨率透射电子显微镜的位错分布的有限元(FE)分析来阐明这种重要关系。还进行了层去除和拉曼光谱研究以探讨膜厚度效应。已经发现,薄膜系统中的残余应力变化是由晶格热失配和离散界面位错的耦合效应引起的,残余应力取决于膜的厚度,正确地确定正确的位置特别重要。通过有限元分析准确计算残余位错的界面位错密度。

著录项

  • 来源
    《Journal of Materials Research》 |2012年第21期|2737-2745|共9页
  • 作者单位

    School of Mechanical and Manufacturing Engineering, The University of New South Wales,New South Wales 2052, Australia;

    School of Mechanical and Manufacturing Engineering, The University of New South Wales,New South Wales 2052, Australia;

    School of Mechanical and Manufacturing Engineering, The University of New South Wales,New South Wales 2052, Australia;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号