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Strain-arranged structure in amorphous films

机译:非晶膜中的应变排列结构

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摘要

Amorphous films [BaTiO_3 (BTO), SrTiO_3 (STO), SrRuO_3] on substrates and self-supported films (BTO and STO) were produced by controlling the film/substrate adhesion energy (level of clamping). The stress value in an as-deposited film depends on the clamping level, which defines the stress relief mode. In highly stressed films, the stress abatement is achieved via plastic transformation resulting in formation of "the strain-arranged structure of elastic domains." Film fractures and delamination occur if the stress magnitude is too high and exceeds the elastic limit of the material. If the stress magnitude is low, the conditions favorable for nucleation and crystallization can arise. Stress in self-supported films is relieved mainly via shape change during film preparation, and the conditions favorable for nucleation and crystallization in annealed self-supported films arise more frequently.
机译:通过控制膜/基底的粘附能(夹持水平),可在基底上形成无定形膜[BaTiO_3(BTO),SrTiO_3(STO),SrRuO_3]和自支撑膜(BTO和STO)。沉积后的薄膜中的应力值取决于夹持水平,该夹持水平定义了应力释放模式。在高应力薄膜中,应力消除是通过塑性转变实现的,从而导致形成“弹性域的应变排列结构”。如果应力大小过高并超过材料的弹性极限,则会发生膜破裂和分层。如果应力大小低,则可能产生有利于成核和结晶的条件。自支撑膜中的应力主要通过膜制备期间的形状变化来缓解,并且退火的自支撑膜中有利于成核和结晶的条件更加频繁地出现。

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  • 来源
    《Journal of Materials Research》 |2012年第22期|2819-2828|共10页
  • 作者单位

    Department of Materials & Interfaces, Weizmann Institute of Science, Rehovot 76100, Israel;

    Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 76100, Israel;

    Department of Materials & Interfaces, Weizmann Institute of Science, Rehovot 76100, Israel;

    Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 76100, Israel;

    Physics Department, Yeshiva University, New York, New York 10016;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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