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Deformation and fracture of single-crystal silicon theta-like specimens

机译：单晶硅θ样试样的变形和断裂

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摘要

Single-crystal silicon test specimens, fabricated by lithography and deep reactive ion etching (DRIE), were used to measure microscale deformation and fracture properties. The mechanical properties of two specimen geometries, both in the form of a Greek letter © (theta), were measured using an instrumented indentation system. The DRIE process generated two different surface structures leading to two strength distributions that were specimen geometry independent: One distribution, centered about 2.1 GPa, was controlled by 35 nm surface roughness of scallops; the second distribution, centered about 1.4 GPa, was controlled by larger, 150 nm, pitting defects. Finite element analyses (FEA) converted measured loads into strengths; tensile elastic measurements validated the FEA. Fractographic observations verified failure locations. The theta specimen and testing protocols are shown to be extremely effective at testing statistically relevant (hundreds) numbers of samples to establish processing-structure-property relationships at ultrasmall scales and for determining design parameters for components of microelectromechanical systems.
机译：通过光刻和深反应离子刻蚀（DRIE）制成的单晶硅试样用于测量微观形变和断裂性能。使用仪器压痕系统测量了两个样品几何形状的机械性能，均以希腊字母©（theta）的形式表示。 DRIE过程产生了两种不同的表面结构，从而导致两种强度分布与样品几何形状无关：一种分布集中在2.1 GPa左右，由扇贝的35 nm表面粗糙度控制；第二个分布集中在约1.4 GPa，受较大的150 nm点蚀缺陷控制。有限元分析（FEA）将测得的载荷转换为强度；拉伸弹性测量验证了FEA。断层观察证实了故障位置。 Theta样品和测试协议在测试统计上相关（数百）的样品以建立超小规模的加工-结构-性能关系以及确定微机电系统组件的设计参数方面非常有效。

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  • 来源
    《Journal of Materials Research》 |2011年第20期|p.2575-2589|共15页
  • 作者

    Michael S. Gaither; Frank W. DelRio; Richard S. Gates; Robert F. Cook;

  • 作者单位

    Nanomechanical Properties Group, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899;

    Nanomechanical Properties Group, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899;

    Nanomechanical Properties Group, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899;

    Nanomechanical Properties Group, Material Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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