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Measuring anisotropy in Young's modulus of copper using microcantilever testing

机译:使用微悬臂梁测试测量铜的杨氏模量的各向异性

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摘要

Focused ion beam machining was used to manufacture microcantilevers 30 μm by 3 μm by 4 μm with a triangular cross section in single crystal copper at a range of orientations between [001] and [110]. These were imaged and tested using AFManoindentation. Each cantilever was indented multiple times at a decreasing distance away from the fixed end. Variation of the beam's behavior with loading position allowed a critical aspect ratio (loaded length:beam width) of 6 to be identified above which simple beam approximations could be used to calculate Young's modulus. Microcantilevers were also milled within a single grain in a polycrystalline copper sample and electron backscattered diffraction was used to identify the direction of the long axis of the cantilever. The experimentally measured values of Young's modulus and their variation with orientation were found to be in good agreement with the values calculated from the literature data for bulk copper.
机译:聚焦离子束加工用于在单晶铜中以[001]和[110]之间的取向范围制造具有三角形横截面的30μmx 3μmx 4μm的微悬臂梁。使用AFM /纳米压痕对它们进行成像和测试。每个悬臂在距固定端的距离递减的情况下多次缩进。梁的行为随加载位置的变化允许识别出6的临界纵横比(加载的长度:梁的宽度),在此之上,可以使用简单的梁近似来计算杨氏模量。微悬臂梁也可以在多晶铜样品的单个晶粒内铣削,并使用电子反向散射衍射来确定悬臂梁的长轴方向。发现杨氏模量的实验测量值及其随取向的变化与从散装铜的文献数据计算出的值非常一致。

著录项

  • 来源
    《Journal of Materials Research》 |2009年第11期|3268-3276|共9页
  • 作者单位

    Department of Materials, University of Oxford, Oxford, United Kingdom OX1 3PH;

    Department of Materials, University of Oxford, Oxford, United Kingdom OX1 3PH;

    Department of Materials, University of Oxford, Oxford, United Kingdom OX1 3PH;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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