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首页> 外文期刊>Journal of Materials Research >Transmission Electron Microscopic Studies On Growth Mechanism Of Yba_2cu_3o_(7-y) Films Formed By Advanced Trifluoroacetates Metalorganic Deposition Process
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Transmission Electron Microscopic Studies On Growth Mechanism Of Yba_2cu_3o_(7-y) Films Formed By Advanced Trifluoroacetates Metalorganic Deposition Process

机译:三氟乙酸盐金属有机沉积工艺形成Yba_2cu_3o_(7-y)薄膜生长机理的透射电镜研究

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摘要

Microstmcture evolution of YBa_2Cu_3O_(7-y) (YBCO) films during the two heat-treatments in the advanced trifluoroacetates metalorganic deposition (TFA-MOD) process has been investigated by means of transmission electron microscopy. In the calcination process, precursor films including nanopores were formed through the shrinkage of the film after a remarkable increase of the thickness due to the thermal decomposition of metalorganic salts in the starting solution. During the crystallization process, the densification and shrinkage of the film occurred after agglomeration of nanopores and coarsening of unreacted phase particles such as Y_2Cu_2O_5, CuO, and Ba-O-F in the precursor films. The YBCO films were then epitaxially grown with the remaining unreacted phase particles in the film, finally pores were generated again by a reaction of these unreacted particles to form YBCO accompanied by the volume reduction. It is important to control the densification of precursor films and coarsening of the unreacted phase particles in the crystallization process, to fabricate YBCO final films with fine crystallinity and high critical current values.
机译:通过透射电子显微镜研究了先进的三氟乙酸金属有机沉积(TFA-MOD)工艺中的两次热处理过程中YBa_2Cu_3O_(7-y)(YBCO)薄膜的微观结构演变。在煅烧过程中,由于起始溶液中金属有机盐的热分解,在厚度显着增加之后,通过薄膜的收缩形成了包括纳米孔的前体薄膜。在结晶过程中,薄膜的致密化和收缩发生在纳米孔的团聚和未反应相颗粒(如Y_2Cu_2O_5,CuO和Ba-O-F)的粗化之后。然后使YBCO膜与膜中剩余的未反应相颗粒一起外延生长,最后通过这些未反应颗粒的反应形成YBCO而再次产生孔,伴随着体积的减小。重要的是在结晶过程中控制前体膜的致密化和未反应相颗粒的粗化,以制造具有良好结晶度和高临界电流值的YBCO最终膜。

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