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The depth distribution of residual stresses in (Ti,Al)N films: Measurement and analysis

机译:(Ti,Al)N膜中残余应力的深度分布:测量与分析

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摘要

A method is introduced to determine the depth distribution of the residual stresses in (Ti,Al)N films. The films were gradually stripped by chemical corrosion, an optical system was designed to test the curvature change of the specimens, and the depth distribution of the residual stresses was calculated. The results show that the residual stresses increase gradually from the interface of film/substrate and reach a maximum value at the middle region, then decrease until the surface.
机译:介绍了一种确定(Ti,Al)N薄膜中残余应力深度分布的方法。通过化学腐蚀将薄膜逐渐剥离,设计光学系统以测试样品的曲率变化,并计算残余应力的深度分布。结果表明,残余应力从薄膜/基体的界面逐渐增大,并在中间区域达到最大值,然后减小直至表面。

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