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首页> 外文期刊>Journal of Materials Research >Formation of loops on the surface of carbon nanofibers synthesized by plasma-enhanced chemical vapor deposition using an inductively coupled plasma reactor
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Formation of loops on the surface of carbon nanofibers synthesized by plasma-enhanced chemical vapor deposition using an inductively coupled plasma reactor

机译：使用感应耦合等离子体反应器通过等离子体增强化学气相沉积法合成的碳纳米纤维表面上形成环

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摘要

Carbon nanofibers (CNFs) were synthesized by both high-density plasma-enhanced chemical vapor deposition (CVD) and thermal CVD. The growth in the former was carried out in an inductively coupled plasma (1CP) reactor. The multilayer loop structure, which was reported to be found on both the inner and outer surfaces of cup-stacked-type CNFs grown using thermal CVD only after heat treatment above 1500 deg C, was observed in the as-grown CNFs only on the outer surface using ICP-CVD. The dangling bonds caused by plasma etching and the bonding between edge carbon atoms aided by the high-density plasma are considered the main reasons of the formation of multilayer loops.
机译：通过高密度等离子体增强化学气相沉积（CVD）和热CVD合成了碳纳米纤维（CNF）。前者的生长在感应耦合等离子体（1CP）反应器中进行。多层环结构，据报道仅在高于1500摄氏度的热处理后，才发现在使用热CVD生长的杯叠式CNF的内表面和外表面上均发现，仅在外层的CNF中观察到表面采用ICP-CVD。由等离子体蚀刻引起的悬空键和由高密度等离子体辅助的边缘碳原子之间的键被认为是形成多层环的主要原因。

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