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首页> 外文期刊>Journal of Materials Research >Oxidation of Ni-toughened nc-TiN/a-SiN_x nanocomposite thin films
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Oxidation of Ni-toughened nc-TiN/a-SiN_x nanocomposite thin films

机译：Ni增韧的nc-TiN / a-SiN_x纳米复合薄膜的氧化

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摘要

Oxidation behavior of Ni-toughened reactively sputtered composite thin films of nanocrystalline TiN and amorphous SiN_x. [denoted as nc-TiN/a-SiNJM]] was explored to understand the oxidation mechanism. The films were deposited on silicon substrate using a magnetron sputtering technique. Oxidation was earned out from 450 deg C up to 1000 deg C. The nature of the oxidation was determined using x-ray photoelectron spectroscopy. The microstracture of the oxidized films was studied using grazing incidence x-ray diffraction. The topography was characterized using atomic force microscopy. It was determined that the oxidation of the nc-TiN/a-SiN^Ni) thin film proceeds primarily through a diffusion process, in which nickel atoms diffuse outward and oxygen ions inward. The oxidation takes place by progressive replacement of nitrogen with diffused oxygen. Five regions were identified in the oxidized layer from surface into the film. For films doped with 2.1 at. percent Ni, a threshold temperature of 850 deg C was determined, below which, excellent oxidation resistance prevails but above which, oxidation takes place at exponential rate, accompanied by abrupt increase of surface roughness.
机译：纳米晶TiN和非晶SiN_x的Ni增韧反应溅射复合薄膜的氧化行为。探索[表示为nc-TiN / a-SiNJM]以了解其氧化机理。使用磁控溅射技术将膜沉积在硅基板上。从450℃直至1000℃进行氧化。使用X射线光电子能谱法确定氧化的性质。使用掠入射x射线衍射研究了氧化膜的微观结构。使用原子力显微镜对形貌进行表征。已确定nc-TiN / a-SiN ^ Ni）薄膜的氧化主要是通过扩散过程进行的，在扩散过程中，镍原子向外扩散，氧离子向内扩散。通过用扩散的氧气逐步替换氮气来进行氧化。从表面到薄膜，在氧化层中确定了五个区域。对于掺杂有2.1 at的薄膜。镍的百分含量确定为850℃的阈值温度，低于该阈值时，存在优异的抗氧化性，但高于该阈值时，以指数速率发生氧化，同时表面粗糙度突然增加。

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  • 来源
    《Journal of Materials Research》 |2005年第10期|p.2754-2762|共9页
  • 作者

    Sam Zhang; Deen Sun; Xianting Zeng;

  • 作者单位

    School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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