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Dielectric and microstructural properties of barium titanate zirconate thin films on copper substrates

机译:钛酸钡锆酸盐薄膜在铜基底上的介电和微观结构性能

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摘要

Barium titanate zirconate, Ba(Ti_(1-x)Zr_x)O_3 (0 ≤ x ≤ 0.25), thin films were deposited via the chemical solution deposition (CSD) method directly on copper foils. The films were processed in a reductive atmosphere containing nitrogen, water vapor, and hydrogen gas at 900℃ to preserve the metallic copper substrate during crystallization. Increasing the fraction of BaZrO_3 revealed several effects, including an increase in unit cell dimensions, a decrease in both the temperature and value of the maximum permittivity, as well as a decrease in the average grain size of the films. The decrease in the relative permittivity was attributed to a grain size effect as opposed to zirconium substitution. In film compositions containing 25 mol% BaZrO_3, the permittivity below T_(max) became dispersive, and the ferroelectric transitions became increasingly diffuse. These characteristics suggest relaxor-like behavior. The dielectric tunability of Ba(T_(1-x)Zr_x)O_3 was studied at room temperature and at T_(max) for each composition. There was little variation in the tunability with measurement temperature; however compositions that were ferroelectric at room temperature saw a decrease in hysteresis at T_(max), and all compositions showed an increase in permittivity.
机译:钛酸钡锆酸盐Ba(Ti_(1-x)Zr_x)O_3(0≤x≤0.25)通过化学溶液沉积(CSD)方法直接沉积在铜箔上。在900℃的含氮,水蒸气和氢气的还原性气氛中对膜进行处理,以在结晶过程中保留金属铜基底。 BaZrO_3含量的增加显示出几种效果,包括单位晶胞尺寸的增加,温度和最大介电常数值的降低以及薄膜平均晶粒尺寸的减小。相对介电常数的降低归因于晶粒尺寸效应,而不是锆取代。在包含25mol%BaZrO_3的膜组合物中,低于T_(max)的介电常数变得分散,并且铁电跃迁变得越来越分散。这些特征表明类似放松剂的行为。研究了Ba(T_(1-x)Zr_x)O_3在室温和T_(max)下每种组合物的介电可调性。随着测量温度的可调性几乎没有变化。然而,在室温下为铁电的组合物在T_(max)处看到磁滞减小,并且所有组合物均显示出介电常数增加。

著录项

  • 来源
    《Journal of Materials Research》 |2005年第10期|p.2838-2844|共7页
  • 作者单位

    North Carolina State University, Department of Materials Science and Engineering, Raleigh, North Carolina 27695;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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