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Compositional tailored sol-gel SiO_2-TiO_2 thin films: Crystallization, chemical bonding configuration, and optical properties

机译:量身定制的溶胶凝胶SiO_2-TiO_2薄膜:结晶,化学键合结构和光学性质

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摘要

Thin films of SiO_2-TiO_2 composite oxides with various SiO_2:TiO_2 compositions were prepared by the sol-gel method, using tetraethylorthosilicate (TEOS) and titanium tetraisopropoxide (TTIP) as precursors. The composition, crystal structure, and chemical bonding configuration of the as-deposited and annealed SiO_2-TiO_2 thin films were analyzed using Rutherford backscattering spectrometry (RBS), glancing incident angle x-ray diffraction (GIAXRD) and Fourier transform infrared spectroscopy (FTIR), respectively. Optical properties of the films were characterized by spectroscopic ellipsometry and ultraviolet-visible spectropho tome try. The Si/Ti ratios in the SiO_2-TiO_2 films agree with the TEOS/TTIP molar ratio in the sol-gel precursor. When the TEOS/(TEOS + TTIP) ratio is greater than 40 percent, the SiO_2-TiO_2 thin films remain amorphous (without formation of TiO_2 crystalline phase) after annealing at temperatures as high as 700 deg C. FTIR spectra indicate that the quantity of Si-O-Ti bonding can be maximized when the TEOS:TTIP in the precursor is 80 percent : 20 percent. The refractive index of the SiO_2-TiO_2 films ncreases approximately linearly to the mixing ratio of TTIP/(TEOS + TTIP). However, SiO_2-rich films possess higher ultraviolet-visible transmittance than the TiO_2-rich films. The modification of microstructure and chemical bonding configuration in the SiO_2-TiO_2 films by the composition and its influence on the optical properties are discussed.
机译:以原硅酸四乙酯(TEOS)和四异丙氧基钛(TTIP)为前驱体,通过溶胶-凝胶法制备了具有多种SiO_2:TiO_2组成的SiO_2-TiO_2复合氧化物薄膜。使用卢瑟福背散射光谱(RBS),掠射入射角X射线衍射(GIAXRD)和傅里叶变换红外光谱(FTIR)分析了沉积和退火后的SiO_2-TiO_2薄膜的组成,晶体结构和化学键构型, 分别。膜的光学性质通过光谱椭圆偏振和紫外可见分光光度法表征。 SiO_2-TiO_2薄膜中的Si / Ti比与溶胶-凝胶前体中的TEOS / TTIP摩尔比一致。当TEOS /(TEOS + TTIP)的比率大于40%时,SiO_2-TiO_2薄膜在高达700摄氏度的温度下退火后仍保持非晶态(不形成TiO_2晶相)。FTIR光谱表明当前体中的TEOS:TTIP为80%:20%时,Si-O-Ti键可以最大化。 SiO_2-TiO_2薄膜的折射率随TTIP /(TEOS + TTIP)的混合比线性增加。然而,富含SiO 2的膜比富含TiO 2的膜具有更高的紫外-可见光透射率。讨论了SiO_2-TiO_2薄膜的微结构和化学键合构型的改变及其对光学性能的影响。

著录项

  • 来源
    《Journal of Materials Research》 |2005年第11期|p.3141-3149|共9页
  • 作者单位

    Department of Materials Science and Engineering, National Cheng Rung University, Tainan, Taiwan, People's Republic of China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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