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Hall-Petch relationship in pulsed-laser deposited nickel films

机译:脉冲激光沉积镍膜中的霍尔-Petch关系

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摘要

Thin-film mechanical properties can be measured using nanoindentation combined with detailed finite element modeling. This technique was used for a study of very fine grained Ni films, formed using pulsed-laser deposition on fused silica, sapphire, and Ni substrates. The grain sizes in the films were characterized by electron microscopy, and the mechanical properties were determined by ultra-low load indentation, analyzed using finite element modeling to separate the mechanical properties of the thin layers from those of the substrates. Some Ni films were deposited at high temperature or annealed after deposition to enlarge the grain sizes. The observed hardnesses and grain sizes in these thin Ni films are consistent with the empirical Hall-Petch relationship for grain sizes ranging from a few micrometers to as small as 10 nm, suggesting that deformation occurs preferentially by dislocation movement even in such nanometer-size grains.
机译:可以使用纳米压痕结合详细的有限元建模来测量薄膜的机械性能。该技术用于研究非常细小的镍膜,该膜是通过在熔融石英,蓝宝石和Ni衬底上进行脉冲激光沉积而形成的。用电子显微镜表征薄膜的晶粒尺寸,并通过超低负荷压痕确定机械性能,并使用有限元模型进行分析,以将薄层的机械性能与基材的机械性能分开。一些镍膜在高温下沉积或在沉积后退火以增大晶粒尺寸。在这些镍薄膜中观察到的硬度和晶粒尺寸与从几微米到小至10 nm的晶粒尺寸的经验霍尔-帕奇关系一致,这表明即使在这样的纳米尺寸晶粒中,位错移动也会优先发生形变。

著录项

  • 来源
    《Journal of Materials Research》 |2004年第1期|p.218-227|共10页
  • 作者

    J.A. Knapp; D.M. Follstaedt;

  • 作者单位

    Sandia National laboratories, Albuquerque, New Mexico 87185-1056;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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