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Young's modulus measurements on ultra-thin coatings

机译：超薄涂层的杨氏模量测量

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摘要

The determination of the mechanical properties of ultra-thin coatings has become more and more important because of the increasing number of applications using such films. However, an accurate mechanical testing of coatings with a thickness down to some nanometers is still a challenge, despite the improvements of existing measurement techniques. Nanoindentation is an often used mechanical nanoprobe. Using the conventional test method with a sharp Berkovich indenter, the problem of the influence of the substrate on the results arises with decreasing film thickness. Therefore, it is nearly impossible to measure the modulus of films with a thickness less than 100-200 nm. The problem can be overcome by using spherical indenters in combination with an analytical solution for the Hertzian contact of coated systems. It allows a separation of film and substrate properties from the load-displacement curve of the compound. Indentation measurements were done at a 44 nm TiN film and at diamondlike carbon coatings in the thickness range between 4.3 nm and 125 nm on Si substrates. Several corrections were applied to obtain wholly elastic force-displacement curves with high accuracy. It is shown in more detail how zero point and thermal drift corrections are used to obtain statistical depth errors below 0.2 nm. Laser-acoustic measurements based on ultrasonic surface waves were chosen as a second method, which also measures the Young's modulus in this thickness range. Although the indentation technique is a local probe and the laser-acoustic technique gives an integrated value for a surface range of some millimeters, the results agree well for the investigated samples. In contrast, it was impossible to get the correct Young's modulus results by conventional indentation measurements with Berkovich indenter, even for ultra-low loads.
机译：由于使用这种薄膜的应用越来越多，因此确定超薄涂层的机械性能变得越来越重要。然而，尽管已有的测量技术有所改进，但是对厚度低至几纳米的涂层进行精确的机械测试仍然是一个挑战。纳米压痕是经常使用的机械纳米探针。使用具有尖锐的Berkovich压头的常规测试方法，随着膜厚度的减小，出现了基板对结果的影响的问题。因此，几乎不可能测量厚度小于100-200 nm的薄膜的模量。通过将球形压头与用于涂层系统的赫兹接触的分析解决方案结合使用，可以解决该问题。它允许从化合物的载荷-位移曲线中分离膜和基材的性能。在Si衬底上的厚度范围在4.3 nm至125 nm之间的44 nm TiN膜和类金刚石碳涂层上进行压痕测量。进行了多次校正，以获取高精度的全弹性力-位移曲线。更详细地显示了零点校正和热漂移校正如何用于获得低于0.2 nm的统计深度误差。选择基于超声表面波的激光声学测量作为第二种方法，该方法还可以测量该厚度范围内的杨氏模量。尽管压痕技术是局部探针，并且激光声学技术可提供几毫米表面范围的积分值，但结果与所研究的样品非常吻合。相反，即使使用超低载荷，也无法通过使用Berkovich压头进行常规压痕测量来获得正确的杨氏模量结果。

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