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Progress toward Systeme International d'Unites traceable force metrology for nanomechanics

机译:迈向Systeme International d'Unites纳米力学可追溯力计量学的进展

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Recent experiments with the National Institute of Standards and Technology (NIST) Electrostatic Force Balance (EFB) have achieved agreement between an electrostatic force and a gravitational force of 10~(-5) N to within a few hundred pN/mu N. This result suggests that a force derived from measurements of length, capacitance, and voltage provides a viable small force standard consistent with the Systeme International d'Unites. In this paper, we have measured the force sensitivity of a piezoresistive microcantilever by directly probing the NIST EFB. These measurements were linear and repeatable at a relative standard uncertainty of 0.8 percent. We then used the calibrated cantilever as a secondary force standard to transfer the unit of force to an optical lever-based sensor mounted in an atomic force microscope. This experiment was perhaps the first ever force calibration of an atomic force microscope to preserve an unbroken traceability chain to appropriate national standards. We estimate the relative standard uncertainty of the force sensitivity at 5 percent, but caution that a simple model of the contact mechanics suggests errors may arise due to friction.
机译:美国国家标准技术研究院(NIST)的静电力天平(EFB)的最新实验已使静电力和10〜(-5)N的重力之间的一致性达到数百pN / muN。这表明从长度,电容和电压的测量结果得出的力提供了一个可行的,与Systeme International d'Unites一致的小力标准。在本文中,我们通过直接探测NIST EFB来测量压阻微悬臂梁的力灵敏度。这些测量是线性的,并且在相对标准不确定度为0.8%时可以重复。然后,我们将校准的悬臂用作辅助力标准,将力的单位转移到安装在原子力显微镜中的基于光学杠杆的传感器。这项实验也许是原子力显微镜首次进行力校准,以保持不间断的溯源链到适当的国家标准。我们估计力敏感度的相对标准不确定性为5%,但请注意,接触力学的简单模型表明可能由于摩擦而产生误差。

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