Quantifying improvements in adhesion of platinum films on brittle substrates

M.J. Cordill; N.R. Moody; D.F. Bahr

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Quantifying improvements in adhesion of platinum films on brittle substrates

机译：定量改善脆性基材上铂膜的附着力

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This study used nanoindentation coupled with stressed overlayers to evaluate the effect of titanium interlayers on the interfacial fracture energy of platinum films on SiO_2 substrates. Interfacial fracture energy was calculated three ways: from platinum buckles that formed spontaneously upon deposition of the film, from buckles that formed upon deposition of a stressed tungsten overlayer, and from blisters triggered by indentation of a platinum film with a tungsten stressed overlayer. The calculated values for the interfacial fracture energy of the Pt-SiO_2 interface were 0.2 and 0.5 J/m~2 for indentation blisters and spontaneous buckles, respectively. The effect of a titanium interlayer on adhesion was examined using a tungsten stressed overlayer coupled with nanoindentation. The addition of a titanium layer improved the adhesion of the platinum film on SiO_2 from 0.2 to 1.0 J/m~2.

机译：这项研究使用纳米压痕结合应力覆盖层来评估钛中间层对SiO_2基底上铂膜的界面断裂能的影响。界面断裂能的计算方法有三种：从沉积薄膜时自发形成的铂金扣环，从沉积有应力的钨上覆层时形成的扣环，以及由铂膜上带有钨的应力覆层的压痕触发的水泡。对于压痕水泡和自发屈曲，Pt-SiO_2界面的界面断裂能的计算值分别为0.2和0.5J / m〜2。钛夹层对附着力的影响使用钨压应力覆盖层和纳米压痕进行了检验。钛层的加入将铂膜在SiO_2上的附着力从0.2提高到1.0 J / m〜2。

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来源
《Journal of Materials Research》 |2004年第6期|p.1818-1825|共8页
作者
M.J. Cordill; N.R. Moody; D.F. Bahr;
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作者单位

School of Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164-2920;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类工程材料学;
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Quantifying improvements in adhesion of platinum films on brittle substrates

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