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首页> 外文期刊>Journal of Materials Research >Carbon nanotubes grown on different-sized rectangular patterns
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Carbon nanotubes grown on different-sized rectangular patterns

机译:碳纳米管生长在不同尺寸的矩形图案上

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摘要

Carbon nanotubes have been synthesized by chemical vapor deposition using a thin iron film as catalyst on the silicon substrate with different-sized rectangular patterns. It is found that the carbon nanotubes grow vertically to the substrate in a high density with a surface shape similar to that of the substrate when the line width of the patterns are larger than 1μm, However, when the line width of the pattern is reduced to below 0.5 μm, carbon nanotubes cannot grow vertically anymore. This phenomenon might be caused by the relaxation of stress in catalyst film and the coalescence of the catalyst clusters to form particles or grains, which contributes to the migration of catalyst from edge to inner part during the nucleation process. These results are very useful for the fabrication of field-emission displays and other devices using patterned carbon nanotubes.
机译:碳纳米管已经通过使用薄铁膜作为催化剂在具有不同尺寸矩形图案的硅基板上通过化学气相沉积法合成。发现当图案的线宽大于1μm时,碳纳米管以与基板类似的表面形状以高密度垂直于基板生长,但是,当图案的线宽减小至小于0.5μm,碳纳米管将不再垂直生长。此现象可能是由于催化剂膜中应力的松弛以及催化剂簇的聚结以形成颗粒或晶粒而引起的,这有助于在成核过程中催化剂从边缘向内部迁移。这些结果对于使用图案化的碳纳米管制造场致发射显示器和其他设备非常有用。

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