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首页> 外文期刊>Journal of Materials Research >Chemical solution deposition of biaxially oriented (Ba,Sr)TiO3 thin films on < 100 > Ni
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Chemical solution deposition of biaxially oriented (Ba,Sr)TiO3 thin films on < 100 > Ni

机译：<100> Ni上双轴取向（Ba，Sr）TiO3薄膜的化学溶液沉积

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Biaxially oriented Ba1-xSrxTiO3 (BST) thin films were fabricated under a highly reducing atmosphere (oxygen partial pressure similar to10(-18) atm) on base metal substrates (<100> Ni) using a fluorinated chemical solution deposition method. The degree of film orientation was investigated with respect to film annealing temperature and composition (x = 0, 0.33, 0.5, 0.67, 1). The solution synthesis route included fluorinated solvents, donor-dopants, and chelating agents for control of orientation, defect chemistry, and morphology. Free-energy and phase diagrams guided solution development using halide addition to avoid intermediate BaCO3 formation and instead produce direct crystallization of BaTiO3-type materials from BaF2. The degree of (200) orientation of BST films deposited on <100> Ni substrates displayed a compositional dependence for 0 < x < 1, with a maximum orientation Lotgering factor approaching unity. Low-temperature (500 degreesC) crystallization of highly oriented films was demonstrated for solution-derived BST on Ni, which may have enabling materials integration implications for capacitors and other applications. [References: 32]
机译：使用氟化化学溶液沉积方法在贱金属衬底（<100> Ni）上的高度还原性气氛（氧分压类似于10（-18）atm）下制造双轴取向Ba1-xSrxTiO3（BST）薄膜。针对膜退火温度和组成（x ＝ 0、0.33、0.5、0.67、1）研究膜取向度。溶液的合成路线包括氟化溶剂，施主掺杂剂和螯合剂，以控制取向，缺陷化学和形态。自由能和相图指导了使用卤化物添加的溶液开发，以避免形成中间的BaCO3，而是从BaF2中产生BaTiO3型材料的直接结晶。沉积在<100> Ni衬底上的BST膜的（200）取向度显示出0

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