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首页> 外文期刊>Journal of Materials Research >Selective modification of the tribological properties of aluminum through temperature and dose control in oxygen plasma source ion implantation
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Selective modification of the tribological properties of aluminum through temperature and dose control in oxygen plasma source ion implantation

机译：在氧等离子体源离子注入中通过温度和剂量控制选择性改变铝的摩擦学性能

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摘要

Improvements in the tribological properties of pure aluminum and "aeronautical" alloy AA7075-T651 were obtained by oxygen-ion implantation [(0.7 to 5) X 10~(17) O/cm~2, 30 keV] using our pulsed electron cyclotron resonance plasma source. This oxygen plasma source ion implantation process produced oxide nanoprecipitates that enhanced the hardness up to three times in the surface layer and caused reductions in the scratch depths and the friction coefficients by similar factors. A spectrum of tribological properties was obtained depending on temperature and ion dose. Temperature measurement and control were obtained through an integrated thermocouple and by changing the duty-cycle of the microwave source. The oxygen content and the depth-resolved chemical composition were measured and optimized using x-ray photoelectron spectroscopy (XPS) combined with Ar-ion etching. The tribological properties were investigated by (i) depth-sensing nanoindentation for hardness and Young's modulus, (ii) scratching and scratch-depth measurement via atomic force microscopy (AFM), and (iii) friction force measurements using AFM. Low-temperature (<=160 deg C) implantations with optimal O-ion doses produced, in both pure and alloyed Al, an approximately 50-nm-thick, smooth, and extremely fine-grained metal-alumina nanocomposite. The resulting surface was hard and stiff but nonbrittle and displayed high scratch resistance and low friction. High-temperature (approx 430 deg C) implantation had different effects on pure Al and AA7075. On pure Al, it produced a very hard but brittle Al_2O_3 layer for which yield points (displacement excursions) were observed at critical load values in the nanoindentation force-displacement curves. On AA7075, XPS chemical profiling revealed an effect of extreme Mg surface segregation and complete Al surface depletion; MgO crystallites formed a rather rough but surprisingly thick layer (>100 nm). The resulting AA7075 surface showed a hardness increase that was substantial but slightly smaller than that obtained at low temperature.
机译：使用脉冲电子回旋共振通过氧离子注入[（0.7至5）X 10〜（17）O / cm〜2，30 keV]获得了纯铝和“航空”合金AA7075-T651的摩擦学性能改进。等离子源。这种氧等离子体源离子注入工艺产生的氧化物纳米沉淀可将表面层的硬度提高三倍，并通过类似因素降低划痕深度和摩擦系数。根据温度和离子剂量获得了摩擦学特性光谱。通过集成的热电偶和更改微波源的占空比来获得温度测量和控制。使用X射线光电子能谱（XPS）结合Ar离子蚀刻对氧含量和深度溶解的化学成分进行了测量和优化。通过（i）硬度和杨氏模量的深度感应纳米压痕，（ii）通过原子力显微镜（AFM）进行的划痕和划痕深度测量以及（iii）使用AFM的摩擦力测量来研究摩擦学性能。在纯铝和合金铝中以最佳O离子剂量进行低温（<= 160℃）注入时，会生成厚度约为50 nm，光滑且极其细化的金属-氧化铝纳米复合材料。所得的表面硬而硬，但不脆，并显示出高耐刮擦性和低摩擦性。高温（大约430摄氏度）注入对纯Al和AA7075具有不同的影响。在纯Al上，它产生了非常硬但脆的Al_2O_3层，在纳米压痕力-位移曲线的临界载荷值下观察到了该屈服点（位移偏移）。在AA7075上，XPS化学分析显示出极高的Mg表面偏析和完全的Al表面耗竭的效果。 MgO微晶形成了一个相当粗糙但出人意料的厚层（> 100 nm）。所得的AA7075表面显示出明显的硬度增加，但比在低温下获得的硬度增加稍小。

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