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首页> 外文期刊>Journal of Materials Research >Shock synthesis of nanocrystalline Si by thermal spraying
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Shock synthesis of nanocrystalline Si by thermal spraying

机译：热喷涂冲击合成纳米晶硅

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Shock synthesis of nanocrystalline Si was accomplished for the first time using thermal spray in which Si powder is injected into a high-energy flame where the particles melt and accelerate to impact on the substrate. A stream of molten Si particles impacted onto Si wafers of two orientations (l00) and (111). The shock wave generated by the sudden impact of the droplets propagated through the underlying Si layer, which experienced a phase transition to a high-pressure form of Si due to propagation of the shock wave. The metastable high-pressure form of Si then transformed to metastable Si-IX, Si-IV (hexagonal diamond-Si), R-8, and BC-8 phases as evidenced by transmission electron microscopy and x-ray diffraction studies. Back-transformed metastable Si grains, with a size range from 2 to 5 nm, were found to be dispersed within Si-I (cubic diamond-Si). The metastable phases formed mostly in deposits on the (100) substrate compared to those of the (l1l) substrate orientations. This behavior can be correlated with the anisotropic nature of the pressure-induced transformations of Si-I.
机译：纳米晶硅的冲击合成是首次使用热喷涂完成的，其中将硅粉注入到高能火焰中，在那里颗粒熔化并加速撞击在基板上。熔融的硅颗粒流撞击到两个方向（100）和（111）的硅晶片上。由液滴的突然冲击产生的冲击波传播通过下面的Si层，由于冲击波的传播，其经历了相转变为高压Si的相变。 Si的亚稳高压形式随后转变为亚稳Si-IX，Si-IV（六方金刚石-Si），R-8和BC-8相，这是通过透射电子显微镜和X射线衍射研究证明的。发现尺寸在2至5 nm范围内的反向转变的亚稳态Si晶粒分散在Si-I（立方金刚石-Si）中。与（111）衬底取向的相比，亚稳态相主要在（100）衬底上的沉积物中形成。这种行为可以与压力诱导的Si-I相变的各向异性性质相关。

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