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首页> 外文期刊>Journal of materials science >Dissolution behavior of MgO thin film-barrier magnetic tunneling junctions
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Dissolution behavior of MgO thin film-barrier magnetic tunneling junctions

机译：MgO薄膜-势垒磁性隧道结的溶解行为

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摘要

The reaction between the water and the MgO thin film of the magnetic tunneling junction barrier under different temperatures were investigated. The epitaxial MgO (001) thin film with a thickness of 20nm was exposed to the deionized water for 5min at different water temperatures. X-ray photoelectron spectroscopy (XPS) combination with in situ Ar+ ion etching and scanning electron microscope (SEM) was used to investigate the chemical composition and formation of the Mg(OH)(2) layer on the MgO film. SEM results showed that the surface morphology strongly depended on the temperature. XPS depth profile measurements reveal the effect of the water temperature on the dissolution of MgO film. The remaining thickness of the film decreases with increasing water temperature. This work proposes the qualitative model representing the mechanism dissolution behavior and the formation of Mg(OH)(2) layer on the MgO film under different water temperatures.
机译：研究了水和磁隧道结势垒的MgO薄膜在不同温度下的反应。在不同水温下，将厚度为20nm的外延MgO（001）薄膜暴露于去离子水中5分钟。 X射线光电子能谱（XPS）与原位Ar +离子蚀刻和扫描电子显微镜（SEM）的结合用于研究MgO膜上Mg（OH）（2）层的化学组成和形成。 SEM结果表明，表面形貌强烈依赖于温度。 XPS深度剖面测量揭示了水温对MgO膜溶解的影响。膜的剩余厚度随着水温的升高而降低。这项工作提出了定性模型，该模型代表在不同水温下MgO膜上的溶解行为和Mg（OH）（2）层形成的机理。

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  • 来源
    《Journal of materials science》 |2019年第7期|6718-6724|共7页
  • 作者

    Tigunta Siriporn; Khlikhum Poompong; Kidkhunthod Pinit; Chanlek Narong; Supadee Laddawan; Pojprapai Soodkhet;

  • 作者单位

    Suranaree Univ Technol, Inst Engn, Sch Mat Engn, 111 Univ Ave, Muang 30000, Nakorn Ratchasi, Thailand;

    Suranaree Univ Technol, Inst Engn, Sch Ceram Engn, 111 Univ Ave, Muang 30000, Nakorn Ratchasi, Thailand;

    Synchrotron Light Res Inst, 111 Univ Ave, Muang 30000, Nakorn Ratchasi, Thailand;

    Synchrotron Light Res Inst, 111 Univ Ave, Muang 30000, Nakorn Ratchasi, Thailand;

    Western Digital Thailand Co Ltd, 140 BangPa In Ind Estate, Ayutthaya 13160, Thailand;

    Suranaree Univ Technol, Inst Engn, Sch Ceram Engn, 111 Univ Ave, Muang 30000, Nakorn Ratchasi, Thailand;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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