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首页> 外文期刊>Journal of materials science >Effect of laser power on microstructure and dielectric properties of BaTi_5O_(11) films prepared by laser chemical vapor deposition method
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Effect of laser power on microstructure and dielectric properties of BaTi_5O_(11) films prepared by laser chemical vapor deposition method

机译：激光功率对激光化学气相沉积法制备BaTi_5O_（11）薄膜的微观结构和介电性能的影响

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摘要

Abstract BaTi_5O_(11) films were prepared on Pt/Ti/SiO_2/Si substrates by a laser chemical vapor deposition method. The effect of laser power (P_L) on microstructure and dielectric properties of the Ti_5O_(11) films was investigated. With increasing P_L from 62 to 108 W, the deposition temperature (T_(dep)) monotonously increased from 872 to 951 K. At T_(dep) = 920 K (P_L = 90 W), the Ti_5O_(11) film had (301) preferred orientation. At T_(dep)≥ 938 K (P_L ≥ 98 W), the preferred orientation changed to (322)/(223). The deposition rate (R_(dep)) was 154.8-177.6 μm h~(-1). With increasing T_(dep), the surface morphologies changed from rectangular to pyramidal, and the dielectric constant (ε_r) increased from 18.3 to 21.4 at 1 MHz and 300 K.
机译：摘要采用激光化学气相沉积法在Pt / Ti / SiO_2 / Si衬底上制备了BaTi_5O_（11）薄膜。研究了激光功率（P_L）对Ti_5O_（11）薄膜的微观结构和介电性能的影响。随着P_L从62 W增加到108 W，沉积温度（T_（dep））从872 K升高到951K。在T_（dep）= 920 K（P_L = 90 W）时，Ti_5O_（11）膜具有（301） ）首选方向。在T_（dep）≥938 K（P_L≥98 W）时，首选方向更改为（322）/（223）。沉积速率（R_（dep））为154.8-177.6μmh·（-1）。随着T_（dep）的增加，表面形态从矩形变为金字塔形，并且介电常数（ε_r）在1 MHz和300 K时从18.3增加到21.4。

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  • 来源
    《Journal of materials science》 |2012年第11期|1961-1964|共4页
  • 作者

    Dongyun Guo; ZAkihiko Ito; Takashi Goto; Rong Tu; Chuanbin Wang; Qiang Shen; Lianmeng Zhang;

  • 作者单位

    State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China,School of Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China,Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan;

    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan;

    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan;

    Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan;

    State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China,School of Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China;

    State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China,School of Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China;

    State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China,School of Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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