Deposition of grid-like single-crystal Ce_2O_3 thin films on LaAlO_3(100) substrate by pulsed laser deposition

Mustafa Tolga YURTCAN

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Deposition of grid-like single-crystal Ce_2O_3 thin films on LaAlO_3(100) substrate by pulsed laser deposition

机译：通过脉冲激光沉积在Laalo_3（100）基板上沉积网格状单晶CE_2O_3薄膜

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Oxygen-deficient Ce_2O_3 growth requires reduction of CeO_2 with hydrogen gas and high temperatures. In this study, a 2-year desiccated target with different oxygen-deficient phases was used as a pellet in order to deposit cerium oxide thin films on LaAlO_3 substrates from 100 to 800 °C by pulsed laser deposition. Desiccated target utilization resulted in pure Ce_2O_3 and CeO_2-Ce_2O_3 mixture thin films verified by X-ray diffraction. Morphology of the thin films was investigated by scanning electron microscope, and seen that Ce_2O_3 films have grid-like surface formation. A fresh target is prepared and used in order to compare the crystal structure of the desiccated target. Experiments repeated with a fresh target and X-ray photoelectron spectroscopy of cerium oxide films indicated that Ce_2O_3 growth depends on target stoichiometry. Further desiccation of the target resulted in single-crystal Ce_2O_3 growth in all temperatures between 100 and 800 °C, attributed to stoichiometric transfer of the target composition.

机译：缺氧Ce_2O_3生长需要用氢气和高温降低CEO_2。在该研究中，使用不同缺氧相的2年干燥的靶用作颗粒，以通过脉冲激光沉积将氧化铈薄膜从100至800℃下沉积在LaAlO_3基板上。干燥的目标利用导致纯CE_2O_3和CEO_2-CE_2O_3混合物通过X射线衍射验证的薄膜。通过扫描电子显微镜研究薄膜的形态，并看出CE_2O_3薄膜具有类似网格的表面形成。制备并使用新的靶以比较干燥目标的晶体结构。用氧化铈膜的新鲜目标和X射线光电子能谱重复的实验表明CE_2O_3生长取决于目标化学计量。靶的进一步干燥导致单晶CE_2O_3在100-800℃之间的所有温度中生长，归因于靶组合物的化学计量转移。

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来源
《Journal of materials science》 |2021年第3期|3854-3862|共9页
作者
Mustafa Tolga YURTCAN;
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作者单位

Department of Nanoscience and Nanoengineering Graduate School of Natural and Applied Sciences Ataturk University 25240 Erzurum Turkey Department of Mathematics & Science Education Kazim Karabekir Education Faculty Atatuerk University 25240 Erzurum Turkey;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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正文语种 eng
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Deposition of grid-like single-crystal Ce_2O_3 thin films on LaAlO_3(100) substrate by pulsed laser deposition

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