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首页> 外文期刊>Journal of Membrane Science >FABRICATION OF ULTRATHIN METALLIC MEMBRANES ON CERAMIC SUPPORTS BY SPUTTER DEPOSITION
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FABRICATION OF ULTRATHIN METALLIC MEMBRANES ON CERAMIC SUPPORTS BY SPUTTER DEPOSITION

机译：通过溅射沉积法在陶瓷载体上制备超薄金属膜

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The present work focuses on the synthesis of ultrathin palladium films (< 500 nm) grown on porous ceramic supports by the sputter deposition technique. The following two parameters were found most critical to the synthesis of the gas-tight metal-ceramic composite: substrate type (surface roughness) and the deposition temperature. Fairly gas-tight Pd films with good adhesion could be coated on sol-gel derived fine pore gamma-alumina supports but not on coarse alpha-alumina supports. Poor adhesion between the coated film and the gamma-alumina support was observed for films coated at room temperature, to a thickness of 300 nm or larger. Both coating temperature (80-600 degrees C) and substrate type affect the grain size, nitrogen gas-tightness and the adhesion of the deposited metallic films. Characterization results show that 400 degrees C is the optimum coating temperature. XRD and SEM data on these films show that the films are fairly crystalline, with a uniform and smooth surface morphology. [References: 23]
机译：本工作着重于通过溅射沉积技术在多孔陶瓷载体上生长的超薄钯膜（<500 nm）的合成。发现以下两个参数对于气密金属陶瓷复合材料的合成最关键：基材类型（表面粗糙度）和沉积温度。具有良好粘附力的相当气密的Pd膜可以涂覆在溶胶-凝胶衍生的细孔γ-氧化铝载体上，而不能涂覆在粗α-氧化铝载体上。对于在室温下涂布至厚度为300nm或更大的膜，观察到涂膜与γ-氧化铝载体之间的粘附性差。涂层温度（80-600摄氏度）和基材类型都会影响晶粒尺寸，氮气气密性和沉积金属膜的附着力。表征结果表明，最佳涂层温度为400摄氏度。这些膜的XRD和SEM数据表明，该膜是相当结晶的，具有均匀和光滑的表面形态。 [参考：23]

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