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首页> 外文期刊>Journal of nano research >Cathodic Arc Deposition of TiCN Coatings - Influence of the C_2H_2/N_2 Ratio on the Structure and Coating Properties
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Cathodic Arc Deposition of TiCN Coatings - Influence of the C_2H_2/N_2 Ratio on the Structure and Coating Properties

机译：TiCN涂层的阴极电弧沉积-C_2H_2 / N_2比对结构和涂层性能的影响

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摘要

TiCN thin coatings with various different carbon contents were deposited using cathode arc evaporation of pure titanium in a mixture of N-2 and C2H2 gasses at a constant pressure of 1.5 Pa. The analyses show a transition from a stoichiometric to a non-stoichiometric coating structure with an increasing C2H2 content. Moreover, the increase in the acetylene in the gas mixture leads to a decrease in the crystal phase from pure polycrystalline to pure amorphous. Nanohardness changes from 30.4 to 4.4 GPa and the cohesive failure of the coatings is in the range of 61 - 72 N. The tribology is estimated by the Ball-on-Disc method and an Si3N4 ball as the counterpart. The measured coefficient of friction is in the range of 0.2 - 0.56.
机译：在1.5 Pa的恒定压力下，在N-2和C2H2气体的混合物中，通过纯钛的阴极电弧蒸发，沉积了具有各种不同碳含量的TiCN薄涂层。分析显示了从化学计量的涂层过渡到非化学计量的涂层结构随着C2H2含量的增加。此外，气体混合物中乙炔的增加导致晶相从纯多晶降至纯无定形。纳米硬度从30.4 GPa变为4.4 GPa，涂层的内聚破坏范围为61-72N。通过圆盘法和Si3N4球作为对应物来评估摩擦学。测得的摩擦系数在0.2-0.56的范围内。

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