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Study on the Surface Damage Layer in Multiple Grinding of Quartz Glass by Molecular Dynamics Simulation

机译：分子动力学模拟研究石英玻璃多次研磨中的表面损伤层

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摘要

The paper focuses on the surface damage of quartz glass in multiple grinding, so as to find out the machining parameters that can improve the surface quality of quartz glass. Molecular dynamics (MD) method is adopted to machine the quartz glass. Firstly, the initial grinding is done on quartz glass with the depth of 12 angstrom. Based on the initial grinding, no feed grinding processes are done for three times separately and the feed grinding processes are carried out on the damage layer left by the previous process. The coordination number (CN) is used to gain the surface topographies of quartz glass and mark the regions of densification. Moreover, the damage layer thickness of different machined surface is also calculated. By analyzing the density of different surface damage layers, the regulation of the density distribution is obtained. Finally, the nanoindentation hardness is gained by different load-displacement curves in nanoindentation simulation. The results show that the first no feed grinding and the second feed grinding can improve the accuracy and quality of grinding. Too many no feed grinding processes and other feed grinding processes will induce serious damage of the machined surface, which is clearly showed in the obvious increase in the density, hardness and thickness of the damage layer. At last, the results of the density analysis and nanoindentation also proved that the densification and hardness of quartz glass cannot increase unlimitedly. The results can be applied in the ultra-precision grinding of quartz glass to control the thickness of damage layer and improve the quality of processing.
机译：本文重点研究了石英玻璃在多次研磨中的表面损伤，以找出可以提高石英玻璃表面质量的加工参数。采用分子动力学（MD）法加工石英玻璃。首先，初始研磨是在石英玻璃上进行的，深度为12埃。基于初始研磨，进料研磨过程不会分别进行三次，并且进料研磨过程是对先前过程留下的损坏层进行的。配位数（CN）用于获得石英玻璃的表面形貌并标记致密化区域。此外，还计算了不同加工表面的损伤层厚度。通过分析不同表面损伤层的密度，得到密度分布的规律。最后，通过纳米压痕模拟中不同的载荷-位移曲线获得纳米压痕硬度。结果表明，一次无进给磨削和第二次进给磨削可以提高磨削的精度和质量。太多的无饲料研磨工艺和其他饲料研磨工艺会导致机加工表面的严重损坏，这可以从损伤层的密度，硬度和厚度的明显增加中明显看出。最后，密度分析和纳米压痕的结果也证明，石英玻璃的致密化和硬度不能无限提高。研究结果可用于石英玻璃的超精密磨削，以控制损伤层的厚度，提高加工质量。

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  • 来源
    《Journal of nano research》 |2017年第2017期|192-202|共11页
  • 作者

    Liu Tao; Guo Xiaoguang; Li Qiang; Kang Renke; Guo Dongming;

  • 作者单位

    Dalian Univ Technol, Non Tradit Machining Minist Educ, Dalian 116024, Peoples R China|Dalian Univ Technol, Key Lab Precis, Dalian 116024, Peoples R China;

    Dalian Univ Technol, Non Tradit Machining Minist Educ, Dalian 116024, Peoples R China|Dalian Univ Technol, Key Lab Precis, Dalian 116024, Peoples R China;

    Dalian Univ Technol, Non Tradit Machining Minist Educ, Dalian 116024, Peoples R China|Dalian Univ Technol, Key Lab Precis, Dalian 116024, Peoples R China;

    Dalian Univ Technol, Non Tradit Machining Minist Educ, Dalian 116024, Peoples R China|Dalian Univ Technol, Key Lab Precis, Dalian 116024, Peoples R China;

    Dalian Univ Technol, Non Tradit Machining Minist Educ, Dalian 116024, Peoples R China|Dalian Univ Technol, Key Lab Precis, Dalian 116024, Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Multiple grinding; Molecular dynamics; Densification; Nanoindentation hardness; Damage layer;

    机译：多次研磨分子动力学致密化纳米压痕硬度损伤层;

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