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Electrostatic Aerosol Deposition Method for the Formation of an Ensemble of Monodisperse Particles on a Substrate

机译:静电气溶胶沉积方法在基材上形成单分散颗粒的集合

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摘要

We have developed an aerosol-based technique for deposition of monodisperse ensembles of spherical SiO2 nanoparticles on the surface of single-crystal silicon substrate (1 cm(2)) with an average surface particle density of about 2.1 +/- 0.4 particles per mu m(2). The obtained samples of monodisperse ensembles SiO2 nanoparticles was characterized by scanning and transmission electron microscopy. The ensemble of deposited nanoparticles is characterized by a narrow size distribution with a modal size of 26.6 nm and a full width at half maximum of 3.5 nm according to the atomic force microscopy data. We have demonstrated the use of the obtained test structure to determine the effective radius of the tip of an atomic force microscope.
机译:我们已经开发了一种基于气溶胶的技术,用于在单晶硅衬底(1 cm(2))的表面上沉积球形SiO2纳米颗粒的单分散团,平均表面密度为每微米约2.1 +/- 0.4颗粒(2)。通过扫描和透射电子显微镜对获得的单分散的纳米SiO2纳米颗粒样品进行了表征。根据原子力显微镜数据,沉积的纳米颗粒的集合的特征在于具有26.6nm的模态尺寸和3.5nm的半峰全宽的窄尺寸分布。我们已经证明了使用获得的测试结构来确定原子力显微镜尖端的有效半径。

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