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Structural and Morphological Changes In Ag:TiN Nanocomposite Films promoted by in-vacuum annealing

机译:真空退火促进Ag:TiN纳米复合薄膜的结构和形态变化

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摘要

Thin films composed of titanium nitride doped with silver were deposited by DC reactive sputtering, with Ag contents varying between 0 and 50 at.%. The as-deposited samples were subjected to vacuum annealing treatments, with a range of temperatures varying from 200 to 500 ℃, in order to study the morphological and structural changes that may occur. The as-deposited samples showed three main zones of basic characteristics, which differ both in terms of morphology and structural features. By increasing the annealing temperature, the thermodynamic stability is accelerated, giving rise to (ⅰ) a uniform dispersion of silver particles at 200 ℃; (ⅱ) the start of segregation at 300 ℃; (ⅲ) at 400 ℃ the coalescence of the segregated Ag particles takes place and finally (ⅳ) at 500 ℃ the formation of large Ag clusters is evident, particularly within the zone that comprises the samples with higher Ag content. In addition to corroborate the presence of free Ag in Ag:TiN thin films, the increasing annealing temperature promotes the improvement of the coating's crystallinity, as well as Ag grain growth.
机译:通过DC反应溅射沉积由掺杂有银的氮化钛组成的薄膜,其中Ag含量在0至50at。%之间变化。对沉积后的样品进行真空退火处理,温度范围为200至500℃,以研究可能发生的形态和结构变化。沉积后的样品显示出三个基本特征的主要区域,它们在形态和结构特征方面都不同。通过提高退火温度,加速了热力学稳定性,使(ⅰ)银颗粒在200℃下均匀分散; (ⅱ)在300℃开始偏析; (ⅲ)在400℃时发生了分离的Ag颗粒的聚结,最后(ⅳ)在500℃时明显形成了大的Ag团簇,特别是在包含较高Ag含量的样品区域内。除了证实在Ag:TiN薄膜中存在游离的Ag外,不断提高的退火温度还促进了涂层结晶度的改善以及Ag晶粒的生长。

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  • 来源
    《Journal of nano research》 |2013年第2013期|67-76|共10页
  • 作者单位

    Centro de Ffsica, Universidade do Minho, 4710-057 Braga, Portugal;

    Centro de Ffsica, Universidade do Minho, 4710-057 Braga, Portugal,Universidade do Porto, Faculdade de Engenharia, Departamento de Engenharia Metalurgica e de Materials, Rua Roberto Frias, s, 4200-465 Porto, Portugal,SEG-CEMUC - Department Mechanical Engineering, University of Coimbra, Portugal;

    Universidade do Porto, Faculdade de Engenharia, Departamento de Engenharia Metalurgica e de Materials, Rua Roberto Frias, s, 4200-465 Porto, Portugal,SEG-CEMUC - Department Mechanical Engineering, University of Coimbra, Portugal;

    Institut FEMTO-ST, UMR 6174, Universite de Franche-Comte, CNRS, ENSMM, UTBM, 32, Avenue de I'observatoire, 25044 BESANCON Cedex, France;

    Centro de Ffsica, Universidade do Minho, 4710-057 Braga, Portugal;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Titanium nitride; silver; vacuum annealing; morphology; structure;

    机译:氮化钛银;真空退火;形态学;结构体;

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