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Miniature Quadrupole Arrays for Residual and Process Gas Analysis

机译：微型四极杆阵列，用于残留和过程气体分析

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This paper includes computer simulations based on ray tracing to aid in the design of miniature quadru-poles. These quadrupoles are then assembled in a matrix-like pattern to operate inparallel. The tradeoffs between sensitivity and resolution for different mechanical and electrical configurations are examined using real-time trajectories of ions. The dependence of resolution versus sensitivity is computed and compared with experimental results. The pressure dependence of the sensitivity is simulated near the upper limit (mtorr range) of the operating pressure. Space charge effects at the inlet of the mass filter are evaluated to properly design electrode apertures and spacing. Using the results of ray tracing, miniature quadrupole arrays were designed and constructed. Performance parameters were derived from recorded spectra and compared with the computations. Since they are able to operate at higher pressures, these sensor-type devices are used as residual gas analyzers (RGAs) and as process gas analyzers (PGAs) in many semiconductor applications. Networking multiple sensors to monitor the state of the semiconductor manufacturing tool and the wafers at different stages of the process enables real-time, wafer-to-wafer control using preset fault detection schemes.
机译：本文包括基于射线追踪的计算机仿真，以帮助设计微型四极杆。然后，将这些四极杆以矩阵状的方式组装以并行运行。使用离子的实时轨迹检查了不同机械和电气配置的灵敏度和分辨率之间的权衡。计算分辨率对灵敏度的依赖性，并将其与实验结果进行比较。在工作压力的上限（mtorr范围）附近模拟灵敏度的压力依赖性。评估质量过滤器入口处的空间电荷效应，以正确设计电极孔径和间距。利用射线追踪的结果，设计并构建了微型四极阵列。从记录的光谱中得出性能参数，并将其与计算结果进行比较。由于它们能够在更高的压力下运行，因此这些传感器类型的设备在许多半导体应用中被用作残留气体分析仪（RGA）和过程气体分析仪（PGA）。通过将多个传感器联网以监视半导体制造工具和工艺不同阶段的晶圆状态，可以使用预设的故障检测方案进行实时的晶圆间控制。

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