Particle Transmission Through a Turbo Pump

Patrick D. Kinney; David Y.H. Pui; Benjamin Y.H. Liu

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Particle Transmission Through a Turbo Pump

机译：通过涡轮泵的颗粒传输

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Experiments were performed to determine if small particles are capable of passing through a turbo- molecular vacuum pump. A test aerosol was generated at atmospheric pressure and injected into the vacuum system upstream of the turbo pump. Particles were measured immediately upstream and downstream of the turbo pup using two laser-based vacuum particle detectors. Tests were performed with solid and liquid particles. Solid particles were found to pass through the pump, although the efficiency of transmission is not known. Liquid particles did not pass through the pump. These results indicate that vacuum particle counters Employed downstream of turbo pumps may be sensitive To upstream particle levels.

机译：进行实验以确定小颗粒是否能够通过涡轮分子真空泵。在大气压下产生测试气雾剂，并将其注入涡轮泵上游的真空系统中。使用两个基于激光的真空粒子检测器，在涡轮增压泵的上游和下游立即测量了颗粒。用固体和液体颗粒进行测试。尽管传输效率未知，但发现有固体颗粒通过泵。液体颗粒没有通过泵。这些结果表明，在涡轮泵下游使用的真空粒子计数器可能对上游粒子水平敏感。

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《Journal of the IEST》 |1998年第3期|p.31-34|共4页
作者
Patrick D. Kinney; David Y.H. Pui; Benjamin Y.H. Liu;
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中图分类环境科学、安全科学;
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Particle Transmission Through a Turbo Pump

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