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首页> 外文期刊>Key Engineering Materials >Advantages in the Small-Angle Scattering of X ray for Studying Optoelectronic Devices within the Frames of ISTC Projects
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Advantages in the Small-Angle Scattering of X ray for Studying Optoelectronic Devices within the Frames of ISTC Projects

机译:X射线小角度散射在ISTC项目框架内研究光电器件的优势

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摘要

The project ISTC "SPECTROMETRIC POSITION SENSITIVE DETECTOR WITH BASE ENERGY SHIFT" is interesting for creation new area semiconductor detector device for EXAFS spectroscopy, for traditional X-ray diffractometry (XRD), as well as Small-Angle X-ray Scattering diffractometry (SASX). Diffractometry methods allow creating original features of position sensitive detector. Crystallography quality of silicon multi layer detector with original photo mask was examined by XRD and SAXS with ordinary scintillation detectors. Grazed incidence SAXS (GISAXS) provides information both about lateral and normal ordering of multilayers at a surface or inside a thin epitaxial film [1]. Using high-energy X-ray source (rotating anode or synchrotron radiation in future) and high adjustment monochromator SAXS rocking curves in transition and reflection mode had been received. It allows obtaining the information of 3D size lamellar or column-like domains. Results of an experimental investigation of the size layer structure are presented.
机译:ISTC项目“具有基本能量转换的光谱位置灵敏检测器”对于创建用于EXAFS光谱,传统X射线衍射(XRD)以及小角度X射线散射衍射(SASX)的新型区域半导体检测器设备很有趣。 。衍射法允许创建位置敏感探测器的原始特征。用XRD和SAXS用普通的闪烁检测器检查了具有原始光掩模的硅多层检测器的晶体学质量。掠入射SAXS(GISAXS)提供有关外延薄膜表面或内部多层的横向和法向排序的信息[1]。使用高能X射线源(将来将使用旋转阳极或同步加速器辐射)和高转换单色仪SAXS在过渡和反射模式下的摇摆曲线。它允许获取3D大小的层状或柱状域的信息。呈现了对尺寸层结构的实验研究的结果。

著录项

  • 来源
    《Key Engineering Materials》 |2010年第2010期|P.641-645|共5页
  • 作者单位

    Ioffe Physical-Technical Institute, Russian Academy of Sciences (RAS) 26, Politecnicheskaya str., Saint-Petersburg, 194021, Russia;

    Ioffe Physical-Technical Institute, Russian Academy of Sciences (RAS) 26, Politecnicheskaya str., Saint-Petersburg, 194021, Russia;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    X-ray; SAXS; crystallography; domain walls;

    机译:X射线SAXS;晶体学畴壁;

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