A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM

著录项

• 来源
  《Key Engineering Materials》 |2010年第2010期|P.590-594|共5页
• 作者

  Ping Yang; Shusaku Shibata; Satoru Takahashi; Kiyoshi Takamasu; Osamu Sato; Sonko Osawa; Toshiyuki Takatsuji;

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• 作者单位

  Department of Precision Engineering, The University of Tokyo, Tokyo, Japan;

  rnDepartment of Precision Engineering, The University of Tokyo, Tokyo, Japan;

  rnDepartment of Precision Engineering, The University of Tokyo, Tokyo, Japan;

  rnDepartment of Precision Engineering, The University of Tokyo, Tokyo, Japan;

  rnAdvanced Industrial Science and Technology, Japan;

  Advanced Industrial Science and Technology, Japan;

  rnAdvanced Industrial Science and Technology, Japan;

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  micro-CMM; multi-probe; yaw error; straightness error; autocollimator; laser interferometer; XY stage;

  机译：微型CMM多探针偏航误差直线度误差自准直仪激光干涉仪XY平台;