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ELID Grinding Characteristics and Surface Analysis for Micro Fabrication of Advanced Ceramics

机译：先进陶瓷微细加工的ELID研磨特性和表面分析

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摘要

The present paper describes the highly efficient and precise ELID grinding method and presents a discussion on the ELID grinding process and the grinding characteristics of several kinds of ceramic materials. The following conclusions are obtained; (1) Good ground surface roughness and accuracy are achieved using the #4000 metal-bonded grinding wheel in through-feed centerless grinding for ZrO2 optical fiber ferrules. (2) Efficient and precise grinding of spherical lens molds with cup wheels using the ELID CG-grinding process was proposed and tested in the present study. (3) The ELID grinding method can be used to fabricate machined surfaces exhibiting desirable characteristics for hard AlN ceramics. The ELID ground AlN demonstrated a surface hardness and sliding characteristics that were superior to those of the polished series. These advantages may be attributable to the diffusion phenomenon of the oxygen element produced by the ELID grinding.
机译：本文介绍了高效，精确的ELID研磨方法，并对ELID研磨工艺和几种陶瓷材料的研磨特性进行了讨论。得到以下结论； （1）使用＃4000金属结合砂轮对ZrO2光纤插芯进行直通无心磨削，可获得良好的地面粗糙度和精度。 （2）提出并通过ELID CG磨削工艺对带有杯形轮的球形透镜模具进行高效，精确的磨削，并在本研究中进行了测试。 （3）ELID研磨方法可用于制造对硬质AlN陶瓷表现出所需特性的机加工表面。 ELID研磨的AlN的表面硬度和滑动特性优于抛光系列。这些优点可归因于由ELID研磨产生的氧元素的扩散现象。

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